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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Gwiy-Sang Chung Chang-Min Ohn |
| Copyright Year | 2006 |
| Description | Author affiliation: Univ. of Ulsan, Ulsan (Gwiy-Sang Chung; Chang-Min Ohn) |
| Abstract | This paper describes the fabrication process and characteristics of a micromachined ceramic pressure sensor based on tantalum nitride (Ta-N) thin film strain gauges that could be used in high temperature applications. The proposed micropressure sensor consisted of Ta-N thin film which was patterned in Wheatstone bridge configuration and sputter-deposited on thermally oxidized, micromachined Si diaphragms with a buried cavity for overpressure tolerance and an Al/Au interconnection layer. This device takes advantage of mechanical properties of single crystalline Si which was used as a diaphragm and made by Si-wafer direct bonding (SDB) and electrochemical etch-stop technology. Moreover, in order to extend range of operating temperatures, Ta-N thin film was used as a sensing element because, compared to other strain gauges, it has the relatively higher electrical resistivity, p = 768.93 muOmegaldrcm, higher stability and gauge factor, GF = 4.12. The fabricated pressure sensor had low temperature coefficient of resistance, TCR = -84 ppm/degC, high sensitivity, low nonlinearity and excellent temperature stability. Sensitivity and maximum nonlinearity in temperature range of 25degC to 200degC were 10.97 -12.1 muV/Vpsi and 0.43 %FS, respectively. These qualities suggest that Ta-N ceramic pressure sensor is very suitable for development of low cost and high temperature integrated pressure sensors. |
| Starting Page | 1111 |
| Ending Page | 1114 |
| File Size | 1270655 |
| Page Count | 4 |
| File Format | |
| ISBN | 1424403758 |
| ISSN | 19300395 |
| DOI | 10.1109/ICSENS.2007.355820 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2006-10-22 |
| Publisher Place | South Korea |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Temperature sensors Fabrication Ceramics Sensor phenomena and characterization Thin film sensors Sputtering Capacitive sensors Temperature distribution Electric resistance Stability |
| Content Type | Text |
| Resource Type | Article |
| Subject | Electrical and Electronic Engineering |
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