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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Bin Guo Bermak, A. Chan, P.C.H. Gui-Zhen Yan |
| Copyright Year | 2006 |
| Description | Author affiliation: Hong Kong Univ. of Sci. & Technol., Kowloon (Bin Guo; Bermak, A.; Chan, P.C.H.) |
| Abstract | The paper describes a fabrication process for convex micro-hotplates (MHPs) using surface micro-machining technology. Surface micro-machining provides simplified process and CMOS compatibility over buck microelectromechanical systems (MEMS). The low yield of the latter limits the dimension of the fabricated array while limited sacrificial layer thickness in the former leads to higher power consumption. In this work, 700degC-950degC annealing process was carried out on the 190 times 190 $mum^{2}$ MHP with 2.8 mum polysilicon sacrificial layer. Higher temperature leads to lower tensional stress of the membrane and larger curvature of the released MHP, which further causes higher thermal efficiency. The 950degC annealed MHP has the largest curvature of 2.438 $cm^{-1}$ and the highest thermal efficiency of 12.76degC/mW. The proposed process is used to fabricate a 4times4 tin oxide gas sensor array. Experimental result on the response of the sensor array to ethanol gas is also illustrated in this paper. |
| Starting Page | 224 |
| Ending Page | 227 |
| File Size | 4293491 |
| Page Count | 4 |
| File Format | |
| ISBN | 1424403758 |
| ISSN | 19300395 |
| DOI | 10.1109/ICSENS.2007.355762 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2006-10-22 |
| Publisher Place | South Korea |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Sensor arrays Tin Gas detectors Annealing Thermal stresses Fabrication CMOS technology Paper technology CMOS process Microelectromechanical systems Membrane Stress Tin Oxide Gas Sensor Array Convex Micro-hotplates |
| Content Type | Text |
| Resource Type | Article |
| Subject | Electrical and Electronic Engineering |
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