NDLI: Sensitive evaluation of ion implantation using short wavelength laser induced photo-acoustic displacement

Content Provider	IEEE Xplore Digital Library
Author	Tsunaki, H. Takenouchi, H. Yoshida, N. Takamatsu, H. Sumir, S.
Copyright Year	1999
Description	Author affiliation: LEO Div., Genesis Technol. Inc., Japan (Tsunaki, H.)
Abstract	A highly sensitive photo-acoustic displacement (PAD) measurement method has been developed and applied to the monitoring of ion implantation in silicon. This technique is based on the measurement of small surface displacement by differential laser interferometer due to the absorption of YAG laser light (/spl lambda/=532 nm). The PAD increased with the ion dose until the amorphous layer was formed. The definite correlation between PAD and ion dose were observed ranging from 1e9/cm/sup 2/ to 1e15/cm/sup 2/ for boron, 5e8/cm/sup 2/ to 1e14/cm/sup 2/ for phosphor and 2e8/cm/sup 2/ to 1e13/cm/sup 2/ for arsenic ion implantation with the energy of 100 keV, respectively. Since the detection error was so small (0.13 picometers as standard deviation) that dose accuracy was confirmed to be very excellent (less than 0.4% :1e11/cm/sup 2/-100 keV for boron). It was also found that the small dose variation (less than 0.2%) in middle dose region (1e13/cm/sup 2/) with high energy phosphor implantation (2 MeV) was accurately detected by this technique.
Starting Page	933
Ending Page	936
File Size	386431
Page Count	4
File Format	PDF
ISBN	078034538X
DOI	10.1109/IIT.1998.813830
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1998-06-22
Publisher Place	Japan
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Ion implantation Atherosclerosis Displacement measurement Wavelength measurement Boron Phosphors Monitoring Silicon Surface emitting lasers Optical interferometry
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in