NDLI: Influence of induced defects on the ultra thin film growth by low energy ion beam deposition

Content Provider	IEEE Xplore Digital Library
Author	Durand, H.-A. Sekine, K. Etoh, K. Ito, K. Kataoka, I.
Copyright Year	1999
Description	Author affiliation: Central Res. Lab., Japan Aviation Electron. Ind. Ltd., Tokyo, Japan (Durand, H.-A.)
Abstract	We introduce here our results of research on the initial stage of thin film formation. Carbon thin films were deposited by ion beam deposition on highly oriented pyrolytic graphite substrates. The surfaces were observed by a scanning tunneling microscope. Although defects induced by ions have different nature, they may appear as similar patterns on scanning tunneling microscope images due to induced perturbation of the partial electronic density. But by analyzing these patterns, it is possible to identify several categories of defects (adsorbed atoms, vacancies and interstitials). The role of such defects on the formation of islands was investigated. For comparison of their influence on the formation of islands, nickel thin films were grown by two methods (ion beam deposition and electron beam evaporation). It was found that ion beam was effective to raise the density of nucleation sites. And the scaling analysis of the images revealed the growth mode of a carbon thin film deposited by ion beam on graphite at 300/spl deg/C.
Starting Page	929
Ending Page	932
File Size	486001
Page Count	4
File Format	PDF
ISBN	078034538X
DOI	10.1109/IIT.1998.813829
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1998-06-22
Publisher Place	Japan
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Transistors Ion beams Sputtering Tunneling Substrates Scanning electron microscopy Pattern analysis Atomic layer deposition Nickel Electron beams
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in