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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Tianchen Wang Samal, S.K. Sung Kyu Lim Yiyu Shi |
| Copyright Year | 2015 |
| Description | Author affiliation: Sch. of ECE, Georgia Inst. of Technol., Atlanta, GA, USA (Samal, S.K.; Sung Kyu Lim) || Univ. of Notre Dame, Notre Dame, IN, USA (Tianchen Wang; Yiyu Shi) |
| Abstract | Through-silicon vias (TSVs) are subject to thermal fatigue due to stress over time, no matter how small the stress is. Existing works on TSV fatigue all rely on measurement-based parameters to estimate the lifetime, and cannot consider detailed thermal profiles. In this paper, we propose a new method for TSV fatigue prediction using entropy production during thermal cycles, which is validated by theoretical analysis and measurement results. By combining thermodynamics and mechanics laws, the fatigue process can be quantitatively evaluated with detailed thermal profiles. Experimental results show that interestingly, the landing pad possesses the most easy-to-fail region, which generates up to 50% more entropy compared with the TSV body. The impact of landing pad dimension and TSV geometries are also studied, providing guidance for reliability enhancement. Finally, full-chip fatigue analysis is performed based on stress superposition. To the best of the authors' knowledge, this is the first TSV fatigue model that is free of measurement data fitting, the first that is capable of considering detailed thermal profiles, and the first framework for efficient full-chip TSV fatigue analysis. |
| Starting Page | 744 |
| Ending Page | 751 |
| File Size | 5533328 |
| Page Count | 8 |
| File Format | |
| e-ISBN | 9781467383882 |
| DOI | 10.1109/ICCAD.2015.7372644 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2015-11-02 |
| Publisher Place | USA |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Fatigue Entropy Stress Production Strain Plastics Through-silicon vias |
| Content Type | Text |
| Resource Type | Article |
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