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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Yi-Ming Chen Cheng-Lin Yang Yao-Ling Cheng Hsiu-Hsiang Chen Ying-Chih Chen Yen Chu Tsung-Eong Hsieh |
| Copyright Year | 2005 |
| Description | Author affiliation: Opto-Electron. & Syst. Labs., Ind. Technol. Res. Inst., Hsinchu, Taiwan (Yi-Ming Chen; Cheng-Lin Yang; Yao-Ling Cheng; Hsiu-Hsiang Chen; Ying-Chih Chen; Yen Chu) |
| Abstract | In this paper, high-speed multi-mode waveguide array is proposed. As a core material, a polymer called SU-8 is used. The index of SU-8 at a wavelength of 850 nm is 1.58. It is highly transparent for wavelengths > 800 nm, has shown heat resistance to temperature > 200 degrees Celsius and it is chemically and mechanically stable [Downey et al., 1993], so it is most suited for optical interconnect applications. In order to reduce the coupling loss of the system, the dimensions of waveguides are taken to be 50 /spl times/ 50 /spl mu/m/sup 2/. The SU-8 is spin-coated on the glass substrate. By varying the spin speed, the height of the layer can be varied from 10 to 60 /spl mu/m. The layer is pre-baked at 95 degrees Celsius to evaporate the solvent. Then after pre-heating, the film is exposed to UV-light with a mask. Following the UV-exposure, the film is post-baked at a temperature of again 95 degrees Celsius. In this post exposure baking step the cross-linking of the polymer takes place in all exposed areas. The SU-8 film is developed in RER 600 (PGMEA). Next, the defined structures are exposed to UV-light and hard-baked at 150 degrees Celsius [Downey et al., 1993], Finally, the embedded waveguides are covered by cladding layer and measured by 850 nm LD. The measurements demonstrate robust 10 Gbps data transmission exceeding 50 mm using a new high-speed 50 /spl mu/m multimode planar waveguide circuit (PLC). This indicates that experiments driving VCSEL-based 850 nm LD optical links 231-1 PRBS signal at speeds up to 10 Gbps. The results can be used to broaden the component specification range for 10 Gigabit optical interconnects applications. |
| Starting Page | 1739 |
| Ending Page | 1743 |
| File Size | 1024238 |
| Page Count | 5 |
| File Format | |
| ISBN | 0780389077 |
| ISSN | 05695503 |
| DOI | 10.1109/ECTC.2005.1442028 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2005-05-31 |
| Publisher Place | USA |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Optical waveguides Optical interconnections Polymers Temperature Optical planar waveguides Planar waveguides Optical materials Resistance heating Chemicals Optical losses |
| Content Type | Text |
| Resource Type | Article |
| Subject | Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering |
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