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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Jaehoon Park Jiwei Lu Stemmer, S. York, R.A. |
| Copyright Year | 2005 |
| Description | Author affiliation: Dept. of Electr. & Comput. Eng., California Univ., Santa Barbara, CA, USA (Jaehoon Park; Jiwei Lu) |
| Abstract | Low loss, tunable capacitors were fabricated by RF magnetron sputtered high-k Bi/sub 1.5/Zn/sub 1.0/Nb/sub 1.5/O/sub 7/ (BZN) thin films. The dielectric properties were extracted by de-embedding procedure up to 20 GHz by means of reflection coefficients measurements. The extracted dielectric properties of BZN thin films were that permittivity was /spl sim/180 and tunability was /spl sim/30%. On vycor glass substrates, the Q factor including dielectric- and electrode-loss was more than 200 up to several GHz for 64 /spl mu/m device. There was no indication of onset of dielectric relaxation for the measurement frequency ranges. Q factor dependency on device geometry was also analyzed. The series resistance of the electrodes dominated the device Q factor at microwave frequencies. The electrode resistances were modeled by the sum of area-, periphery-, and conductor-dependent terms. The periphery-dependent series resistance was the most affected by the changes of device changes. Based on the analysis, improved device performance at microwave could be expected by increasing device perimeter. The BZN thin film capacitors with the high Q factor, electric field dependent permittivity, and refined device layout can be the alternative microwave passive components. |
| Starting Page | 776 |
| Ending Page | 778 |
| File Size | 402622 |
| Page Count | 3 |
| File Format | |
| ISBN | 0780389077 |
| ISSN | 05695503 |
| DOI | 10.1109/ECTC.2005.1441359 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2005-05-31 |
| Publisher Place | USA |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Thin film devices Capacitors Microwave frequencies Dielectric thin films Dielectric substrates Q factor Sputtering Dielectric measurements Permittivity measurement Electrodes |
| Content Type | Text |
| Resource Type | Article |
| Subject | Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering |
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