NDLI: Handling partial correlations in yield prediction

Content Provider	IEEE Xplore Digital Library
Author	Varadan, S. Wang, J. Jiang Hu
Copyright Year	2008
Description	Author affiliation: Texas A&M Univ., College Station (Varadan, S.)
Abstract	In nanometer regime, IC designs have to consider the impact of process variations, which is often indicated by manufacturing/parametric yield. This paper investigates a yield model - the probability that the values of multiple manufacturing/circuit parameters meet certain target. This model can be applied to predict CMP (chemical-mechanical planarization) yield. We focus on the difficult cases which have large number of partially correlated variations. In order to predict the yield for these difficult cases efficiently, we propose two techniques: (1) application of orthogonal principle component analysis (OPCA); (2) hierarchical adaptive quadrisection (HAQ). Systematic variations are also included in our model. Compared to previous work, the OPCA based method can reduce the error on yield estimation from 17.1%-21.1% to 1.3%-2.8% with 4.6x speedup. The HAQ technique can reduce the error to 4.1%-5.6% with 6x-9.4x speedup.
Starting Page	543
Ending Page	548
File Size	272506
Page Count	6
File Format	PDF
ISBN	9781424419210
DOI	10.1109/ASPDAC.2008.4484010
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2008-03-21
Publisher Place	South Korea
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Random variables Semiconductor device modeling Planarization Predictive models Yield estimation Circuit synthesis Computational efficiency Manufacturing processes Virtual manufacturing Timing
Content Type	Text
Resource Type	Article

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
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3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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