NDLI: Highly Sensitive PZT Thin Film Ultrasonic Micro-sensors with Grooved Diaphragm

Content Provider	IEEE Xplore Digital Library
Author	Xiong, S. Kawada, H. Yamanaka, H. Matsushima, T. Muralt, P.
Copyright Year	2007
Description	Author affiliation: Matsushita Electr. Works, Ltd., Osaka (Xiong, S.; Kawada, H.; Yamanaka, H.; Matsushima, T.)
Abstract	Highly sensitive piezoelectric ultrasonic micro-sensors with a grooved multilayer membrane have been developed by Si-based MEMS technique. The groove was located at one-quarter of the membrane and opened in piezoelectric layer. The piezoelectric layer PZT is 2.2 mum thick and was prepared by sol-gel method. The prepared PZT films shows pure perovskite and high (100) textured strucure. The sensitivity of the fabricated piezoelectric ultrasonic sensor without the groove structure is 100 muV/Pa. On the other hand, the sensitivity of the ultrasonic sensor with the groove structure is about 500 muV/Pa, which is 5 times higher than that without the groove structure. The diaphragm having grooves shows a corrugate-like structure that was formed by residual stress. The high sensitivity of the membrane with the grooved diaphragm is considered to relate with the corrugate-like structure.
Starting Page	707
Ending Page	710
File Size	4616477
Page Count	4
File Format	PDF
ISBN	9781424413331
ISSN	10994734
DOI	10.1109/ISAF.2007.4393378
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2007-05-27
Publisher Place	Japan
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Transistors Electrodes Biomembranes Piezoelectric films Scanning electron microscopy Thin film sensors Sensor phenomena and characterization X-ray scattering Polarization Tensile stress
Content Type	Text
Resource Type	Article

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