NDLI: Combined piezo-force microscopy and conductive atomic-force microscopy for investigating leakage current conduction and local domain structure of PbTiO3 thin films

Content Provider	IEEE Xplore Digital Library
Author	Hvun Ju Lee KeunLee Yong Cheol Shin Gun Hwan Kim Cheol Seong Hwang Jae Wan Hong
Copyright Year	2007
Description	Author affiliation: Seoul Nat. Univ., Seoul (Hvun Ju Lee; KeunLee; Yong Cheol Shin; Gun Hwan Kim; Cheol Seong Hwang)
Abstract	Local ferroelectric properties and leakage current behaviors of atomic-layer-deposited $PbTiO_{3}$ (PTO) thin films on Ir electrode were investigated by piezo-force microscopy (PFM) and conductive atomic-force microscopy (CAFM). The as-grown PTO thin films were amorphous due to their low growth temperature (200degC). Post-deposition annealing (PDA) at 600degC for 30 min under 02 atmosphere using furnace crystallized the stoichiometric (Pb/Ti atomic ratio ~ 0.97) films into perovskite structure. The film morphology was critically dependent on the heating schedule during PDA; fast heating and cooling (< 5 min) resulted in a crystallized film with the rough and irregular morphology whereas the slow heating and cooling (> 60 min) resulted in a film with better morphology. The leakage current of the former case was much higher than that of the latter. The large leakage current adversely interferes with the polarization of the film during the PFM measurement. However, the local leakage current did not show any clear correlation with the local ferroelectric status of the grains and morpological changes.
Starting Page	367
Ending Page	369
File Size	2677317
Page Count	3
File Format	PDF
ISBN	9781424413331
ISSN	10994734
DOI	10.1109/ISAF.2007.4393267
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2007-05-27
Publisher Place	Japan
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Microscopy Leakage current Morphology Heating Ferroelectric materials Conductive films Crystallization Cooling Ferroelectric films Electrodes
Content Type	Text
Resource Type	Article

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