NDLI: The study of modeling and controlling for evaporation source in vacuum coating

Content Provider	IEEE Xplore Digital Library
Author	Yanzhe Li Duowang Fan Shuben Yang Linggang Kong Qingfang Teng
Copyright Year	2009
Description	Author affiliation: Education Ministry Key Laboratory of Opt-Electronic Technology and Intelligent Control, State Green Coating Technology and Equipment Engineering and Technology Research Centre, LanZhou Jiaotong University, 30070, China (Yanzhe Li; Duowang Fan; Shuben Yang; Linggang Kong; Qingfang Teng)
Abstract	According to energy conversation and thermodynamics theory, the transfer function model of evaporation source in vacuum coating can be built up. With respect to the problem that parameters of evaporation source change greatly, the conventional PID control hardly ensures stability of system, manpower intervention is largely need during coating process, and the quality of coating film is unstable, this paper suggests a method using the variables of deviation and deviation changes to distinguish closed-loop system stability. Based on this, a control method of the PI parameters self-tuning real-time online by fuzzy is introduced. The simulation results show that the evaporation source control method of the PI parameters self-tuning real-time online by fuzzy has well control effectiveness in evaporation source closed-loop system stability.
Starting Page	3406
Ending Page	3410
File Size	306112
Page Count	5
File Format	PDF
ISBN	9781424427222
DOI	10.1109/CCDC.2009.5191901
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-06-17
Publisher Place	China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Real time systems Stability Three-term control Elementary particle vacuum Transfer functions Control systems Coatings Modeling Fuzzy control Thermodynamics Thermal variables control Closed-Loop System Stability Evaporation Source PI Fuzzy
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in