NDLI: Comprehensive optimization of an XY nano positioning stage with flexure-hinges and lever mechanisms

Content Provider	IEEE Xplore Digital Library
Author	Xiaohui Xiao Lizhi Pan Pinkuan Liu Xuemei Tong Caiyu Yin
Copyright Year	2010
Description	Author affiliation: School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai, 200240 China (Pinkuan Liu) \|\| School of Power and Mechanical Engineering, Wuhan University, Wuhan 430072 Hubei, China (Xiaohui Xiao; Lizhi Pan; Xuemei Tong; Caiyu Yin)
Abstract	Concerning compliant micro-positioning stage adopting flexure hinges with lever magnifying mechanism, aiming at performance of as large motion space, little parasitic motion and high response bandwidth, a series measures for optimization design are proposed to balance the lever magnification ratio and parasitic motion coupling ratio, based on comparative analysis of eighty sets of design schemes. Then, those proposed optimization measures were implemented to design a compliant XY nano positioning stage. FEM analyses in ANSYS software were adopted to verify the minimum parasitic motion effects and guarantee the workspace, as while as static and dynamic performances of the stage. The magnifying ratios of the optimized stage in X and Y axis achieve 5.0580 and 5.1351 respectively, while parasitic motion ratio is decreased to 0.003. The $1^{st}$ natural frequency of the manipulator is 582.01Hz, while its rise time of step response is less than 0.0005s.
Starting Page	368
Ending Page	373
File Size	222088
Page Count	6
File Format	PDF
ISBN	9781424488964
e-ISBN	9781424488971
DOI	10.1109/NMDC.2010.5652301
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2010-10-12
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Couplings Actuators Nano-positioning stage Fasteners Lever mechanism Finite element methods Parasitic motion Optimization Manipulator dynamics Flexure hinge
Content Type	Text
Resource Type	Article

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