NDLI: Comparison of piezoceramic, piezopolymer and single crystal materials for use in micromachined bimorph structures

Content Provider	IEEE Xplore Digital Library
Author	Farlow, R. Galbraith, W. Puccio, J.
Copyright Year	2002
Description	Author affiliation: Dept. of Electron. & Electr. Eng., Univ. of Strathclyde, Glasgow, UK (Farlow, R.; Galbraith, W.; Puccio, J.)
Abstract	Miniature bimorph and unimorph structures provide a novel approach to the generation of ultrasonic signals in a gaseous medium such as air. It is shown that such devices can be constructed from piezoceramic, piezopolymer and single crystal materials. Fabrication involves the use of a micromachining system based on a copper vapour laser. The fundamental wavelength of this laser is 511nm, however its versatility is greatly enhanced by the utilisation of a frequency-doubling cell that facilitates operation at ultraviolet wavelengths. It is shown that the performance of a device fabricated form any one of the previously mentioned materials can be accurately predicted using mutually consistent displacement and natural frequency equations that are the product of a recently developed theory.
Sponsorship	Ultransonics Ferroelectr., & Frequency Control Soc
Starting Page	1055
Ending Page	1058
File Size	418840
Page Count	4
File Format	PDF
ISBN	0780375823
ISSN	10510117
DOI	10.1109/ULTSYM.2002.1192476
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2002-10-08
Publisher Place	Germany
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Piezoelectric materials Crystalline materials Optical materials Gas lasers Frequency Signal generators Optical device fabrication Micromachining Copper Equations
Content Type	Text
Resource Type	Article

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