NDLI: Low-temperature micromachined cMUTs with fully-integrated analogue front-end electronics

Content Provider	IEEE Xplore Digital Library
Author	Noble, R.A. Davies, R.R. King, D.O. Day, M.M. Jones, A.R.D. McIntosh, J.S. Hutchins, D.A. Saul, P.
Copyright Year	2002
Description	Author affiliation: Malvern Technol. Centre, QinetiQ Ltd, Malvern, UK (Noble, R.A.; Davies, R.R.; King, D.O.; Day, M.M.; Jones, A.R.D.)
Abstract	The powerful combination of silicon micromachining and integrated-circuit (IC) technology will lead to the realisation of fully-integrated Capacitive Micromachined Ultrasonic Transducer (cMUT) arrays plus signal conditioning electronics on the same substrate. For imaging applications, this functionality permits low-parasitic connectivity to individual elements within dense 2D arrays. This is vital for cMUT devices, in terms of maximising signal-to-noise ratio (SNR), sensitivity and bandwidth, but critically for arrays in achieving high yield and manufacturability, and ultimately low cost. This paper presents the successful demonstration of this level of integration using "post-processing" microfabrication techniques, which allow the independent optimisation of both cMUT and electronics performance. The approach to optimisation of the design and fabrication, of both cMUT and electronics, will be presented including measured and simulated results for fully integrated cMUT devices with their associated analogue front-end amplifiers.
Sponsorship	Ultransonics Ferroelectr., & Frequency Control Soc
Starting Page	1045
Ending Page	1050
File Size	926122
Page Count	6
File Format	PDF
ISBN	0780375823
ISSN	10510117
DOI	10.1109/ULTSYM.2002.1192474
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2002-10-08
Publisher Place	Germany
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Ultrasonic transducer arrays Silicon Micromachining Ultrasonic transducers Ultrasonic imaging Signal to noise ratio Bandwidth Manufacturing Costs Design optimization
Content Type	Text
Resource Type	Article

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