NDLI: Evidence for the transformation of switching hole traps into permanent bulk traps under negative-bias temperature stressing of high-k P-MOSFETs

Content Provider	IEEE Xplore Digital Library
Author	Gao, Y. Ang, D.S. Young, C.D. Bersuker, G.
Copyright Year	2012
Description	Author affiliation: School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 639798 (Gao, Y.; Ang, D.S.) \|\| SEMATECH, 2706 Montopolis Drive, Austin, Texas 78741-6499, USA (Young, C.D.; Bersuker, G.)
Abstract	Under a given stress field, the recoverable component (R) for HfO2 p-MOSFET appears almost constant at lower temperatures but shows a progressive decrease at higher temperatures. Similar conclusion can also be obtained for HfSiON p-MOSFET. Evidence shows that the decrease in R is due to its transformation into a more permanent form (P). We show that those switching hole traps (SHTs) responsible for the R share the same origin as a portion of bulk traps responsible for the stress induced leakage current (SILC) and 1/f noise of the high-k gate p-MOSFET. When the density of SHTs is constant, no increase in 1/f noise and SILC, i.e. no apparent generation of bulk traps, is observed after NBTI stress. An increase in the SILC and 1/f noise, which implies the generation of bulk traps, is observed when part of these SHTs are transformed into relatively permanent bulk traps, allowing them to be sensed by the slow SILC and 1/f noise measurements.
File Size	329263
File Format	PDF
ISBN	9781457716782
ISSN	19381891
e-ISBN	9781457716805
e-ISBN	9781457716799
DOI	10.1109/IRPS.2012.6241842
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2012-04-15
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Stress Noise Logic gates Hafnium compounds MOSFET circuits High K dielectric materials Temperature measurement 1/f noise Bias temperature instability recoverable component bulk traps switching hole traps SILC
Content Type	Text
Resource Type	Article

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