NDLI: On the microscopic limit of the modified reaction-diffusion model for the negative bias temperature instability

Content Provider	IEEE Xplore Digital Library
Author	Schanovsky, F. Grasser, T.
Copyright Year	2012
Description	Author affiliation: Institute for Microelectronics, TU Wien, Gußhausstraße 27-29/E360, 1040, Austria (Schanovsky, F.; Grasser, T.)
Abstract	It has recently been proposed that the inability of the reaction-diffusion model for the negative bias temperature instability to properly predict the experimentally observed recovery transients is due to the incomplete description of atomic motion in the one dimensional macroscopic formulation of the theory. In order to investigate this claim, we develop a microscopic formulation of the modified reaction-diffusion model and simulate it using the kinetic Monte Carlo algorithm. The results of the macroscopic and the atomistic formulation are compared. It shows that the recovery behavior predicted by the RD theory is not affected by the change of the formulation. However, differences arise for the degradation behavior, which, as the microscopic formulation is the physically more accurate description, raise questions regarding the physical relevance of the reaction-diffusion theory. In extension it is shown that any rate-equation based description in the atomic level context will be unable to properly describe the early stages of degradation.
File Size	258778
File Format	PDF
ISBN	9781457716782
ISSN	19381891
e-ISBN	9781457716805
e-ISBN	9781457716799
DOI	10.1109/IRPS.2012.6241940
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2012-04-15
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Microscopy Degradation Hydrogen Mathematical model Stochastic processes Stress Equations
Content Type	Text
Resource Type	Article

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