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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Stellari, F. Song, P. Weger, A.J. Miles, D.L. |
| Copyright Year | 2009 |
| Description | Author affiliation: IBM T.J. Watson Research Center, 1101 Kitchawan Rd., Yorktown Heights, NY 10509, USA (Stellari, F.; Song, P.; Weger, A.J.) || IBM System and Technology Group, 2070 Route 52, Hopewell Junction, NY 12533, USA (Miles, D.L.) |
| Abstract | In this paper, we present for the first time the use of an optical imaging technique that we have developed to map systematic and random variability effects across several phases of development of a new microprocessor chip fabricated with the latest IBM SOI 65 nm technology. The technique relies on the detection and subsequent analysis of the Light Emission from Off-State Leakage Current (LEOSLC) by means of static imaging cameras, mounted on a microscope or other optical collection optics. The variability maps created using this method are very simple to generate and have been successfully verified by comparing them to data obtained by on-chip electrical sensors such, as Process Sensitive Ring Oscillators (PSROs), power supply currents, and test results. The visual representation is very helpful in picking up systematic effect and to measure the correlation distance of the variations. |
| Starting Page | 640 |
| Ending Page | 649 |
| File Size | 1365479 |
| Page Count | 10 |
| File Format | |
| ISBN | 9781424428885 |
| ISSN | 15417026 |
| DOI | 10.1109/IRPS.2009.5173323 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2009-04-26 |
| Publisher Place | Canada |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Random processes Optical imaging Optical microscopy Stimulated emission Optical sensors Microprocessor chips Leak detection Image analysis Leakage current Cameras systematic and random process variations emission microscopy light emission from off state leakage current |
| Content Type | Text |
| Resource Type | Article |
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