Please wait, while we are loading the content...
| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Lim, Y.K. Arijit, R. Pey, K.L. Tan, C.M. Seet, C.S. Lee, T.J. Vigar, D. |
| Copyright Year | 2005 |
| Description | Author affiliation: Chartered Semicond. Manuf. Ltd., Singapore, Singapore (Lim, Y.K.) |
| Abstract | Stress migration (SM) reliability of wide copper (Cu) interconnects with gouging vias was studied using a via chain structure stressed at temperatures ranging from 150/spl deg/C to 200/spl deg/C. After a 1000-hour SM test, via chain structures at the edge of the wafer were observed to have extremely high resistance due to the formation of stress-induced voids at the silicon nitride (Si/sub 3/N/sub 4/) cap/via interface around the perimeter of the gouging via and at the via bottom. One of the dominant causes for this phenomenon was attributed to the presence of process-induced weak points resulting from poor diffusion barrier layer coverage at the sidewall of the via bottom. In addition, a simulation model based on a three dimensional (3D) finite element analysis (FEA) was developed to study the stress distribution of a gouging via. The simulation results showed that high tensile stress was found at the Si/sub 3/N/sub 4/ cap/via interface around the perimeter of the gouging via. It is believed that at high temperature stressing, the presence of process-induced weak points, coupled with the high tensile stress, favor void nucleation. The steep stress gradient developed around the void vicinity after its nucleation was proposed to be the dominant driving force for subsequent vacancy accumulation and void growth extending beneath the gouging via, thus leading eventually to an open circuit. The effect of via gouging on the SM performance of Cu interconnects was also discussed. |
| Sponsorship | IEEE Electron Devices Soc. IEEE Reliability Soc |
| Starting Page | 203 |
| Ending Page | 208 |
| File Size | 1236261 |
| Page Count | 6 |
| File Format | |
| ISBN | 0780388038 |
| DOI | 10.1109/RELPHY.2005.1493085 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2005-04-17 |
| Publisher Place | USA |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Integrated circuit interconnections Samarium Lead Tensile stress Artificial intelligence Copper Very large scale integration Fabrication Argon Pulp manufacturing |
| Content Type | Text |
| Resource Type | Article |
National Digital Library of India (NDLI) is a virtual repository of learning resources which is not just a repository with search/browse facilities but provides a host of services for the learner community. It is sponsored and mentored by Ministry of Education, Government of India, through its National Mission on Education through Information and Communication Technology (NMEICT). Filtered and federated searching is employed to facilitate focused searching so that learners can find the right resource with least effort and in minimum time. NDLI provides user group-specific services such as Examination Preparatory for School and College students and job aspirants. Services for Researchers and general learners are also provided. NDLI is designed to hold content of any language and provides interface support for 10 most widely used Indian languages. It is built to provide support for all academic levels including researchers and life-long learners, all disciplines, all popular forms of access devices and differently-abled learners. It is designed to enable people to learn and prepare from best practices from all over the world and to facilitate researchers to perform inter-linked exploration from multiple sources. It is developed, operated and maintained from Indian Institute of Technology Kharagpur.
Learn more about this project from here.
NDLI is a conglomeration of freely available or institutionally contributed or donated or publisher managed contents. Almost all these contents are hosted and accessed from respective sources. The responsibility for authenticity, relevance, completeness, accuracy, reliability and suitability of these contents rests with the respective organization and NDLI has no responsibility or liability for these. Every effort is made to keep the NDLI portal up and running smoothly unless there are some unavoidable technical issues.
Ministry of Education, through its National Mission on Education through Information and Communication Technology (NMEICT), has sponsored and funded the National Digital Library of India (NDLI) project.
| Sl. | Authority | Responsibilities | Communication Details |
|---|---|---|---|
| 1 | Ministry of Education (GoI), Department of Higher Education |
Sanctioning Authority | https://www.education.gov.in/ict-initiatives |
| 2 | Indian Institute of Technology Kharagpur | Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project | https://www.iitkgp.ac.in |
| 3 | National Digital Library of India Office, Indian Institute of Technology Kharagpur | The administrative and infrastructural headquarters of the project | Dr. B. Sutradhar bsutra@ndl.gov.in |
| 4 | Project PI / Joint PI | Principal Investigator and Joint Principal Investigators of the project |
Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon |
| 5 | Website/Portal (Helpdesk) | Queries regarding NDLI and its services | support@ndl.gov.in |
| 6 | Contents and Copyright Issues | Queries related to content curation and copyright issues | content@ndl.gov.in |
| 7 | National Digital Library of India Club (NDLI Club) | Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach | clubsupport@ndl.gov.in |
| 8 | Digital Preservation Centre (DPC) | Assistance with digitizing and archiving copyright-free printed books | dpc@ndl.gov.in |
| 9 | IDR Setup or Support | Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops | idr@ndl.gov.in |
|
Loading...
|