NDLI: Study of chemical staining on metallization for SEM image quality effect improvement

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2014 IEEE International Conference on Semiconductor Electronics (ICSE2014)

2012 10th IEEE International Conference on Semiconductor Electronics (ICSE)

2010 IEEE International Conference on Semiconductor Electronics (ICSE2010)

2008 IEEE International Conference on Semiconductor Electronics

International advisory committee

Scope of conference

Message from ICSE2008 conference chair

Table of contents

Plenary invited papers

Quantum nanoelectronics: Challenges and opportunities

Germanium nanostructures for electronic memory application

Low noise avalanche photodiodes

Carbon-based electrical interconnect and thermal interface materials

Design and Optimization of 40V, 0.18μm versatile HVL-DMOS device with DOE

Design of 0.18um high voltage LDMOS for automotive application

Switching converter with highly stable delta-sigma modulator

Design and simulation of one-port SAW resonator for wireless and high temperature application

Hybrid clock network for altera structure ASIC devices

High performance configurable distributed hybrid memory in structured ASIC

Pre-silicon MOSFET mismatch modeling for early circuit simulations

Time optimized implantation modeling for accurate process simulation

Low-power high-tuning range CMOS ring oscillator VCOs

Optimum quad band DCO in DS method for WCDMA transmitter in 90nm CMOS

Systematic approach to ultra-wideband Low Noise Amplifier design in CMOS technology

A CMOS instrumentation amplifier with low voltage and low noise for portable ECG monitoring systems

CMOS integrator design for non-coherent UWB receivers

Analog front end modules design in non-coherent UWB receivers for sensor networks

Design considerations of Sub-100nm Dual Material Gate Fully Depleted Silicon On Insulator (DMG-FD-SOI)

A comparative study on analog/RF performance of ultra-thin body (UTB) SOI and double gate MOSFETs

Faster delay modeling and power optimization for on-chip global interconnects

On-chip crosstalk noise reduction model using interconnect optimization techniques

Process simulation of trench gate and plate and trench drain SOI nLDMOS with TCAD tools

Design of a high speed and low latency crypto-processor ASIC

Design of I/Q demodulator for W-CDMA

Low power ROM employing dynamic threshold-voltage MOSFET (DTMOS) technique

A Study on the effect of varying voltage supply on the performance of voltage sense amplifiers for 1-Transistor DRAM memories

Phase frequency detector of delay locked loop at high frequency

VLSI design and analysis of low power 6T SRAM cell using cadence tool

Design of a 10 GHz Ring Oscillator for PDK verification

Ion-selective field-effect transistor sensor response for neural network supervised learning

30 GHz SPDT switch design using 0.15 μm GaAs technology for microwave applications

Parasitic effects of spiral inductors on the performance of GaAs-based MMIC low noise amplifier

The computational intelligence in simulation of DG MOSFET: Application to the simulation of the nanoscale CMOS circuit

A coupled-field fluid-structure interaction (FSI) simulation of an electrostatically actuated diaphragm valveless micropump (EDVM)

Dimension optimization of a MEMS LC pressure sensor

Design and simulation of a high temperature MEMS micro-hotplate for application in trace gas detection

A built-in self repairable RF MEMS filter using redundant structures

The design and simulation of an optimized MEMS varactor with high q factor for RF circuits

Design of MEMS biomedical pressure sensor for gait analysis

Modeling of a micro-diaphragm biosensor for human artery pulse wave detection

A Novel Neural Network Model of Capacitive MEMS Accelerometers

Design of a micromechanical system utilizing hydrogel force for controlling a microvalve

Capacitive pressure sensors based on MEMS, operating in harsh environments

Formation and status of the MEMS microfluidics industry

Parametric simulations of a micromachined mesoscopic acoustic speaker

Squeeze film air damping analysis of MEMS piezoresistive accelerometer

Characterization of HNA etchant for silicon microneedles array fabrication

Design of thermal dual-mass MEMS gyroscope with 2-DoF drive mode oscillator

Design and analysis of MEMS piezoresistive SiO cantilever-based sensor with stress concentration region for biosensing applications

Flow Behaviour of Fluid-Structure Interaction (FSI) System of Piezoelectric Actuated Valveless Micropump (PAVM)

Fabrication and characterization of glass-based MEMS transformer with single layer coil structure

Preparation of glucose hydrogel as actuator in microvalve

Deposition and etching of diaphragm and sacrificial layer in novel MEMS capacitive microphone structure

First resonance frequency and high sensitivity for MEMS acoustic sensors

Study of the performance of the (In0.1Ga0.9N/SiC/Si) solar cells

Reliable fast detection anti-collision technique for RFID system implemented on chip

Design and optimization of distributed Bragg reflector for 1310nm vertical cavity surface emitting lasers

Multiplication gain and excess noise factor in double heterojunction avalanche photodiodes

Electroluminescent from hybrid of Cdse quantum dot-organic light emitting diode

Temperature dependence of dark current in a Si-pin photodiode

All-optical logic gates using diffraction grating fabricated by ion-exchange technique

The effect of surface texturing on GaAs solar cell using TCAD tools

Thermo-optic switch based on multimode interference

Effect of illumination positioning on the characteristics of an Inas interdigitated lateral PIN photodiode

SNR prediction model of an InAs interdigitated lateral p-i-n photodiode

Design and modeling of a vertical-cavity surface-emitting laser (VCSEL)

The characterization of FTTH wavelength selective coupler

Design of FTTH demultiplexer based on cascaded wavelength selective coupler

Design optimization of GaInNAs quantum wells for long wavelength VCSEL

Fabrication of CdSe quantum dots-PHF organic hybrid light emitting diodes

Fabrication of organic solar cells based on a blend of donor-acceptor molecules by inkjet printing technique

Ring cavity multi-wavelength Brillouin-erbium fiber laser utilizing a fiber Bragg grating filter

The preparation of Copper phthalocyanine thin film on silicon substrate for solar cell application

On the dependency of equivalent circuit parameters of heterojunction bilayer copper phthalocyanine/perylene photovoltaic device on light intensity based on reverse bias characteristic

Development of gas sensor system based on the TiO/Pani composite thin film

Design and fabrication of an acrylic-based 1×2 POF coupler using CNC Machining

Optical transceiver design for POF portable optical access-card system using light-to-frequency converter

Multi-finger gate ISFET (Mf-ISFET) for pH sensor application.

Alcohol sensing properties of nanosized thick film WO doped with Y

The performance of fluorescence gas sensor using TiO coated dye-porphyrin nanocomposite thin films

Fabrication of thin layer membrane using CMOS process for very low pressure sensor applications

Evaluation on metal photo rework scheme for yield improvement

Time and cost reduction for 45° notch oriented 〈100〉 silicon substrate sample prepation

Beam propagation modelling of the digital response in cosine S-bend waveguide branch

Influence of conformal nitride material impacting the OTP & MTP data retention performance

The effect of clean and no-clean flux in enhancing the wettability of eutectic solder bump flip chip PBGA

A practical investigation on the root causes of the mechanical damages of pogo pin type test sockets to IC packages in final test

Thermal management issues in Laser diode packaging

Al based LTCC tape for packaging of RF devices

Ultra fine pitch 20 micron 2N second bond Improvement with new capillary surface morphology

Study of chemical staining on metallization for SEM image quality effect improvement

Analogue diagnosis of CMOS floating gate defect (FGD) using Genetic Algorithms (GAs)

A case study of a change in migration behaviour of a transferred AlCu metallization

High Current batch Implanter Accelerator Column particle reduction

DRAM EOS failure mechanisms and failure analysis by non-destructive technique

12N test procedure for NPSF testing and diagnosis for SRAMs

Impact of poly field plate dimension towards LDMOS performance

A novel multizone doped and multistep oxide high breakdown voltage lateral bipolar transistor on SOI

A comparative study between zirconium dioxide and hafnium dioxide dielectric charges

Experimental analysis of read related transistors’ gate width sizing effects on the 3T1D DRAM access time curve

A case study of NMOS AC hot carrier injection lifetime improvement

On the subthreshold measurements of SIC MOSFETs

Design of 900MHz voltage-controlled oscillator using 0.18μm CMOS technology

Performance of the forward-biased RF-LNA with deep n-well NMOS transistor

Ballistic carrier transport in a quasi-two-dimensional nanoscale field effect transistor (FET)

Silicon pillar thickness effect on vertical double gate MOSFET (VDGM) with oblique rotating implantation (ORI) method

Comparison between OTCP and C-V extraction methods for radiation-induced traps in MOSFET devices

Improved series resistance model for CMOS ESD diodes

Short channel effect of SOI vertical sidewall MOSFET

Surface morphology of Ni-Fe thin films grown on copper substrates using pulse electrodeposition in ultrasonic field

A novel Partial SOI power device with step in buried oxide for improvement of breakdown voltage

The impact of Silicon-Cap on electrical characteristics of Schottky Barrier p-MOSFET with strained channel

A novel structure for optimization of switching speed in nanoscale Double Gate Tunnel FET

Surface roughness contribution to MHEMT mobility characteristics

HEMT Transistor Noise modeling using generalized radial basis function

Recent development in the growth of ZnO nanoparticles thin film by magnetron sputtering.

Carrier velocity in carbon nano tube field effect transistor

Surface morphology and particle size analysis of Ba0 nano-powder grown using sol-gel method

Synthesis of CdSe quantum dots: Effect of surfactant on the photoluminescence property

The selectivity of quartz crystal microbalance gas sensor coated with TiO-porphyrin nanocomposite thin films towards volatile organic compounds

Synthesis of nanoflake ZnO

The variation of optical absorption edge with sintering time for the ceramic ZnO + xMnO

Formulation and simulation for electrical properties of a (5,3) Single Wall Carbon Nanotube

Effect of treated silver nanoparticles to electrical conductivity improvement of electrically conductive adhesive (ECA)

Characterization of Co-synthesized Titanium and ZnO nanostructures

Study of the contact properties of ZnO nanowires with Ag and Au/Ag

Study of cobalt doping on the electrical and optical properties of titanium dioxide thin film prepared by sol-gel method

The effect of annealing temperatures on zinc oxide thin films properties for electronic devices application

The effect of annealing temperature on the electrical and optical properties of nanostructured ZNO for UV sensing applications

Modelling of the current-voltage characteristics of a carbon nano tube field effect transistor

Four wave mixing in fibre ring laser with inclusion of Photonic Crystal Fibre

Growth characterization of InAs multi-oxide layer vertical-cavity surface-emitting lasers structure

Iterative solution method in semiconductor equations

Quantox analysis of SC-1 and SC-2 variables in wafer surface preparation

A case study of pad dual profile issues encountered at pad etch

Improvement of backside emission analysis sample prep process for BGA

Self-aligned double-gate (DG) vertical MOSFET’s using oblique rotating implantation (ORI) method with reduced parasitic capacitance

Cobalt stripping process integration for cobalt salicide residue improvement

Radiance RTP wafer out of pocket alarm influenced by preheat recipe

A useful etchant to create cavitations of cobalt salicide layer in a cross-sectioned sample

Studies of the critical LDD area for HCI improvement

Silicon nitride gate ISFET fabrication based on four mask layers using standard MOSFET technology

A case study of how pattern density affect metal etch

CMOS standby leakage current problems in microcontroller device

A modified lift-off technique to prevent pattern following effect in microfabrication

Characterization analysis of a novel approach in fabrication of CMOS compatible vertical MOSFETs incorporating a dielectric pocket

Post-thermal annealing effects on the optical, structural and morphological properties of hydrogenated silicon (Si:H) thin films prepared by layer-by-layer (LBL) deposition technique

DOE study on etching rate of silicon nitride (Si) layer via RIE nitride etching process

2006 IEEE International Conference on Semiconductor Electronics

2004 IEEE International Conference on Semiconductor Electronics

ICONIP '02. Proceedings of the 9th International Conference on Neural Information Processing. Computational Intelligence for the E-Age (IEEE Cat. No.02EX575)

ICSE 2000. 2000 IEEE International Conference on Semiconductor Electronics. Proceedings (Cat. No.00EX425)

ICSE'98. 1998 IEEE International Conference on Semiconductor Electronics. Proceedings (Cat. No.98EX187)

ICSE '96. 1996 IEEE International Conference on Semiconductor Electronics. Proceedings

Study of chemical staining on metallization for SEM image quality effect improvement

Content Provider	IEEE Xplore Digital Library
Author	Chan Sieng Fong Ng Hong Seng
Copyright Year	2008
Description	Author affiliation: X-FAB Sarawak Sdn. Bhd., Kuching (Chan Sieng Fong; Ng Hong Seng)
Abstract	Chemical staining is commonly used to delineate sample for construction analysis. A wide range of wet etchants are available such as acid-based, alkaline-based solutions and organic solvents. Etch artifacts and over-etched profile maybe observed after wet staining on metal profile. Wet chemical treatment is also essential after dry etching during RIE delayering to reveal metallization of interest. The plasma residue on metal surface should be eliminated to enable accurate metal profile inspection. In this paper, the impact of different wet chemical solutions on SEM image quality is presented. Construction analysis and delayering were focused on metallization.
Starting Page	410
Ending Page	413
File Size	1324158
Page Count	4
File Format	PDF
ISBN	9781424438730
DOI	10.1109/SMELEC.2008.4770352
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2008-11-25
Publisher Place	Malaysia
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Metallization Image quality Chemical analysis Wet etching Delay Solvents Dry etching Plasma applications Plasma chemistry Surface treatment
Content Type	Text
Resource Type	Article

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