NDLI: Design and analysis of MEMS piezoresistive SiO cantilever-based sensor with stress concentration region for biosensing applications

Content Provider	IEEE Xplore Digital Library
Author	Rahim, R.A. Bais, B. Majlis, B.Y.
Copyright Year	2008
Description	Author affiliation: Inst. of Microengineering & Nanoelectronic, Univ. Kebangsaan Malaysia, Bangi (Rahim, R.A.; Bais, B.; Majlis, B.Y.)
Abstract	This paper uses finite element method to obtain the optimal performance of piezoresistive microcantilever sensor by optimizing the geometrical dimension of both cantilever and piezoresistor. A 250 mum times 100 mum times 1 mum $SiO_{2}$ cantilever integrated with 0.2 mum thick Si piezoresistor was used in this study. The sensor performance was measured on the basis of displacement sensitivity and surface stress sensitivity. The resulting maximum displacement value is about 0.7 nm for an applied load of 250 pN. A comparison between polySi and $SiO_{2}$ cantilever has been carried out which shows the latter gives higher displacement for the same applied load. The sensor sensitivity was investigated by varying cantilever thickness as well as piezoresistor thickness. Simulation results show that the cantilever sensitivity is maximum when both the cantilever and the piezoresistor thicknesses are at minimum. Simulations were also conducted on the effects of incorporating various stress concentration region (SCR) designs at the bottom of the cantilevers. Cantilevers with incorporated stress concentration regions shows improved sensitivity over the cantilever without SCR. The cantilever with a rectangular shaped SCR extended up to the edge of the cantilever width yields a maximum Mises stress of 0.73 kPa compares to the other designs. For the same design, the cantilever with minimum SCR thickness of 0.2 mum yields maximum stress which results in maximum sensitivity.
Starting Page	211
Ending Page	215
File Size	956716
Page Count	5
File Format	PDF
ISBN	9781424438730
DOI	10.1109/SMELEC.2008.4770310
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2008-11-25
Publisher Place	Malaysia
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Micromechanical devices Piezoresistance Stress Biosensors Finite element methods Thyristors Silicon Mechanical sensors Chemical and biological sensors Structural beams
Content Type	Text
Resource Type	Article

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