NDLI: Coupling Characteristics of Induction Coil in Atmospheric Pressure Inductively Coupled Plasmas

Content Provider	IEEE Xplore Digital Library
Author	Razzak, M.A. Takamura, S. Uesugi, Y.
Copyright Year	2005
Description	Author affiliation: Dept. of Energy Eng. & Sci., Nagoya Univ. (Razzak, M.A.; Takamura, S.)
Abstract	Summary form only given. The coupling characteristics between induction coil and radio frequency (RF) discharges generated by inductively coupled plasma technique (ICP) at the initial start-up phase in near atmospheric pressure range is investigated experimentally. A rapid increase of the plasma loading resistance and decrease of the effective coil loading inductance were observed during the dynamic change of plasma from electrostatic (E) to electromagnetic (H) mode. During this dynamic mode transition, frequency and phase shift from their resonance value, thereby deviating the output RLC circuit including RF induction coil from its ideal resonance condition. The total load of the inverter power source becomes slightly capacitive, thereby increasing the switching losses of the static inverter transistor (SIT) inverter elements. As a result, the power coupling efficiency between plasma and RF source $(P_{abs}/P_{RF})$ as well as the power efficiency of the RF source $(P_{RF}/P_{DC})$ strongly deteriorates, thereby decreasing the effective plasma production efficiency. Having employed a constant-current high-power immittance conversion circuit shows successful improvement of the power efficiency in induction plasma generation. A frequency sweeping experiment bringing the driving frequency close to resonance one also improve the coupling efficiency of the induction coil as well as the power efficiency of inverter power source, which enhances the plasma heating and production efficiency
Sponsorship	Plasma Sci. Appl. Comm. IEEE Nucl. Plasma Sci. Soc.
Starting Page	228
Ending Page	228
File Size	1377022
Page Count	1
File Format	PDF
ISBN	0780393007
ISSN	07309244
DOI	10.1109/PLASMA.2005.359284
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2005-06-20
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Coils Atmospheric-pressure plasmas Plasma properties Radio frequency Plasma sources Inverters Resonance Induction generators RLC circuits Coupling circuits
Content Type	Text
Resource Type	Article
Subject	Atomic and Molecular Physics, and Optics Condensed Matter Physics Electrical and Electronic Engineering

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in