NDLI: Pulsed Ion Extraction from Shunting Arc Assisted Burst RF (195 kHz) Plasma

Content Provider	IEEE Xplore Digital Library
Author	Yukimura, K. Ego, K. Takaki, K. Mukaigawa, S. Fujiwara, T.
Copyright Year	2005
Description	Author affiliation: Dept. of Electr. Eng., Doshisha Univ., Kyoto (Yukimura, K.; Ego, K.)
Abstract	Summary form only given. A burst RF (radio frequency, 195 kHz) inductively coupled plasma in a methane circumstance is generated with assistance of a pulsed carbon shunting arc discharge. The shunting arc is a metallic/semi-metallic plasma source without any trigger sources, and is ignited synchronously with the RF burst signal. The RF plasma was ignited at a methane pressure higher than 0.05 Pa and even in the vacuum, although the burst RF plasma is ignited at a pressure higher than 1.2 Pa in the absence of the shunting arc triggering. This hybrid plasma generation system is suitable for plasma-based ion implantation and deposition (PBII&D) to synthesize various compounds by combining gaseous species generated by the RF plasma with metallic species generated by the shunting arc discharge plasma. The emission spectra from the RF plasma, the shunting arc and their hybrid plasma were observed. When only the shunting arc is ignited, carbon spectrum at a wavelength of 426.7 nm significantly appears, and changes temporally with the behavior of the shunting arc current. For the hybrid plasma of the shunting arc and RF plasma, CH spectrum with a wavelength of 431.4 nm is observed in addition to the carbon spectrum. The ion density at the target immersed in the plasma is estimated by the ion sheath resistance. It is confirmed that the shunting arc enhances the ionization and excitation of methane particles. For the hybrid plasma of RF and shunting arc discharge, the plasma density is in a range of 10 $^{10}$ to $10^{11}$ $cm^{-3},$ which is higher by a factor of approximately 10 than that of the shunting arc discharge. Being proportional to the plasma density, the ion current extracted from the hybrid plasma becomes higher than that from each plasma, where a target with a diameter of 80 mm is immersed in the plasma by applying a train of pulsed voltage
Sponsorship	Plasma Sci. Appl. Comm. IEEE Nucl. Plasma Sci. Soc.
Starting Page	99
Ending Page	99
File Size	1171464
Page Count	1
File Format	PDF
ISBN	0780393007
ISSN	07309244
DOI	10.1109/PLASMA.2005.359045
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2005-06-20
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Radio frequency Plasma immersion ion implantation Plasma density Plasma waves Plasma sources Arc discharges Plasma sheaths Hybrid power systems Pulse generation RF signals
Content Type	Text
Resource Type	Article
Subject	Atomic and Molecular Physics, and Optics Condensed Matter Physics Electrical and Electronic Engineering

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in