NDLI: Fabrication of micro membrane reactor for hydrogen peroxide production

Content Provider	IEEE Xplore Digital Library
Author	Lee, S.H. Maeda, R. Mizukami, F.
Copyright Year	2002
Description	Author affiliation: Integrated Solid-state Electro Mech. Instruments, AIST Tsukuba, Japan (Lee, S.H.; Maeda, R.)
Abstract	The authors are developing a Pd membrane-based micro chemical reactor using micromachining technology to produce hydrogen peroxide from the direct reaction of oxygen and hydrogen. Reaction gases are delivered through gas channels, that is, polyimide for oxygen and silicon for hydrogen. The hydrogen peroxide at the surface of the membrane is synthesized without external energy. The micro chemical reactor includes the Pd catalyst, micro channels for delivering the reaction gases, and a temperature sensor and microheater fabricated by microsystem technology. The Si is fabricated by deep RIE etching to produce the hydrogen gas channels. The palladium catalyst layer is coated by an evaporation method to permeate the hydrogen selectively, and the Pt layer for temperature sensor and microheater is also deposited by the evaporation method. Lastly, the polyimide layer is fabricated using a sacrificial layer.
Sponsorship	Japan Soc. Appl. Phys. IEEE Electron Device Soc
Starting Page	200
Ending Page	201
File Size	103133
Page Count	2
File Format	PDF
ISBN	4891140313
DOI	10.1109/IMNC.2002.1178613
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2002-11-06
Publisher Place	Japan
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Fabrication Biomembranes Inductors Production Hydrogen Chemical reactors Chemical technology Gases Polyimides Temperature sensors
Content Type	Text
Resource Type	Article

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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