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Content Provider | IEEE Xplore Digital Library |
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Author | Goto, K. Kurihara, K. Suzuki, K. Nikolov, I. |
Copyright Year | 2002 |
Description | Author affiliation: Sch. of High Technol. for Human Welfare, Tokai Univ., Shizuoka, Japan (Goto, K.; Kurihara, K.; Suzuki, K.; Nikolov, I.) |
Abstract | A new optical memory system is urgently required to realize larger memory capacity and faster data transfer rate for the coming higher speed internet er-a. To overcome the current capacity barrier and the current low data transfer rate barrier in the far-field optical techniques, a novel near-field optical memory of super-parallel evanescent waves has been proposed and is being developed using a vertical cavity surface emitting laser (VCSEL) probe array, which consists of the VCSEL array as a light source and the GaP probe 2D array as the evanescent wave efficient generator. Fabrication and estimation of higher optical throughput for GaP probe array are described with 1.25% high throughput efficiency adopting a newly developed microlens array between the VCSEL output windows and the each GaP nano-probe in the array, where the focal points of each microlens inside the each semiconductor nano-probe are exactly coincident by the newly developed self-alignment technology. An array of up to 10,000 elements had been prepared successfully using the newly developed micro-fabrication processes, including the nano-photolithography, dry etching with ion milling and reactive ion etching processes, and the AR-coating deposition process to the high refractive index material surfaces. |
Sponsorship | Japan Soc. Appl. Phys. IEEE Electron Device Soc |
Starting Page | 310 |
Ending Page | 311 |
File Size | 187830 |
Page Count | 2 |
File Format | |
ISBN | 4891140313 |
DOI | 10.1109/IMNC.2002.1178667 |
Language | English |
Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Publisher Date | 2002-11-06 |
Publisher Place | Japan |
Access Restriction | Subscribed |
Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Subject Keyword | Lenses Microoptics Apertures Optical arrays Optical surface waves Optical refraction Optical variables control Vertical cavity surface emitting lasers Stimulated emission Probes |
Content Type | Text |
Resource Type | Article |
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