NDLI: Uncertainties caused from surface contaminations to estimate the thickness of SiO/sub 2/ ultrathin films

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Uncertainties caused from surface contaminations to estimate the thickness of SiO/sub 2/ ultrathin films

Content Provider	IEEE Xplore Digital Library
Author	Azuma, Y. Fujimoto, T. Kojima, I. Shinozaki, A. Morita, M.
Copyright Year	2002
Description	Author affiliation: Mater. Characterization Div., Agency of Ind. Sci. & Technol., Ibaraki, Japan (Azuma, Y.; Fujimoto, T.; Kojima, I.)
Abstract	The development of the evaluation method for the thickness of ultrathin SiO/sub 2/ films on a Si substrate is a very important. SiO/sub 2/ is currently used as a gate dielectric material of a metal-oxide-semiconductor field effect transistors (MOSFET), and thicknesses of the film have been decreasing every year. In ITRS (International Technology Road Map for Semiconductors), it is required to measure the film thicknesses in the range of 1.8-0.6 nm with an uncertainty (3/spl sigma/) of /spl plusmn/ 4% in near feature. It is necessary for the accurate evaluation of a film thickness to estimate the various factors of the uncertainty. In this study, we focus on an effect of surface contaminations as one of the component of the uncertainties for thickness estimations. We propose an estimation method of the SiO/sub 2/ film thickness without surface contamination effect by using grazing incidence X-ray reflectivity (GIXRR) and X-ray photoelectron spectroscopy.
Sponsorship	Japan Soc. Appl. Phys. IEEE Electron Device Soc
File Size	46461
File Format	PDF
ISBN	4891140313
DOI	10.1109/IMNC.2002.1178641
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2002-11-06
Publisher Place	Japan
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Uncertainty Surface contamination Semiconductor films Dielectric substrates Dielectric materials FETs MOSFET circuits Dielectric measurements Thickness measurement Pollution measurement
Content Type	Text
Resource Type	Article

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