NDLI: Fabrication of high accuracy micro-translation-table for near-field optical data storage actuated by inverted-scratch-drive-actuators

Content Provider	IEEE Xplore Digital Library
Author	Kanamori, Y. Yahagi, H. Ono, T. Sasaki, M. Hane, K.
Copyright Year	2002
Description	Author affiliation: Dept. of Mechatronics & Precision Eng., Tohoku Univ., Sendai, Japan (Kanamori, Y.; Yahagi, H.; Ono, T.; Sasaki, M.; Hane, K.)
Abstract	In recent years, development of a next generation high-density recording system has attracted an increasing attention with the improvement of the storage density. One of the attractive technologies to overcome the limit of the storage density is near-field optical data storage. The optical memory with high density and high data transfer rate is highly demanded to utilize an array of nano-scaled light sources for writing and reading bits formed on a recording medium. We have fabricated a micro-translation-table to convey the recording medium to the near-field optical head. The proposed micro-translation-table consists of the inverted scratch drive-actuators (SDAs) which are electrostatically driven. The inverted SDA is powerful and precise due to the stepwise movement. A long distance translation is achieved by repeating the stepwise movement. Fast moving speed, high response and the positioning resolution of the order of 1 nanometer are possible. The inverted SDA has been fabricated with silicon surface micromachining technology. We have proposed a novel mechanism that the SDAs can be retracted to a substrate by applying the voltage between the SDA and a lower electrode. Therefore, the SDAs used for the conveyance are stretched and others are retracted. We have observed that a micro object is translated with the fabricated actuators by applying AC voltage of 600 V at 100 Hz.
Sponsorship	Japan Soc. Appl. Phys. IEEE Electron Device Soc
Starting Page	306
Ending Page	307
File Size	156272
Page Count	2
File Format	PDF
ISBN	4891140313
DOI	10.1109/IMNC.2002.1178665
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2002-11-06
Publisher Place	Japan
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Optical device fabrication Optical recording Optical arrays Voltage Read-write memory Light sources Writing Magnetic heads Silicon Micromachining
Content Type	Text
Resource Type	Article

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