NDLI: Development of Roll Metal Mold by Synchrotron Radiation

Content Provider	IEEE Xplore Digital Library
Author	Idei, K. Ishizawa, N. Noda, D. Hattori, T.
Copyright Year	2006
Description	Author affiliation: New Bus. Planning Group, Nakanishi Metal Works Co. Ltd., Osaka (Idei, K.; Ishizawa, N.; Noda, D.; Hattori, T.)
Abstract	Embossing roll processing is one of various highly efficient processing methods for continuously printing a pattern designed on the surface of a roll onto sheets and plates. Efforts to apply the embossing roll processing method to the fabrication of micro components have drawn attention recently. This paper details our study to produce a micro patterned embossing roll with a 3D X-ray lithography process. More specifically, the outer surface of a cylindrical steel roll (12 mm in diameter) was coated with photo resist, and 3D X-ray lithography with synchrotron radiation was employed to fabricate a hole-shaped pattern (approx. 10 mum in diameter) on the outer surface. The outer surface of the roll was then plated with copper to fabricate copper dots (each approx. 10 mum in diameter), which were used as etching masks to perform wet etching on the roll. Consequently, we were able to fabricate a structure whose outer surface is dotted with numerous microstructures. However, edge of the pattern part that was masked by copper was underetched, and the expected shape was not able to obtain. Then, we examined the possibility of the processing by the verification of the problem of a wet etching, and the dry etching
Starting Page	1
Ending Page	6
File Size	5812766
Page Count	6
File Format	PDF
ISBN	1424407176
DOI	10.1109/MHS.2006.320295
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2006-11-05
Publisher Place	Japan
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Synchrotron radiation Embossing Copper Wet etching X-ray lithography Printing Fabrication Steel Resists Microstructure
Content Type	Text
Resource Type	Article

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
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