NDLI: Fabrication and Characterization of 4-DOF Soft-Contact Tactile Sensor and Application to Robot Fingers

Content Provider	IEEE Xplore Digital Library
Author	Dzung Viet Dao Sugiyama, S.
Copyright Year	2006
Description	Author affiliation: Center for Promotion of the 21st Century COE Program, Ritsumeikan Univ., Shiga (Dzung Viet Dao)
Abstract	This paper describes the development and application of a 4-DOF (degree of freedom) soft-contact tactile (SCT) sensor using 6-DOF micro force moment sensing (MFMS) chip. The 6-DOF MFMS chip is working based on the piezoresistive effect in single crystalline silicon and has been fabricated and calibrated completely. The MFMS chip has been packaged to produce a 4-DOF soft-contact tactile sensor, which has the contact part made of silicone rubber. The sensor can independently detect three components of force (Fx', Fy', Fz') and one components of moment (Mz'). The MFMS chip and the SCT sensor have been calibrated. The calibrated sensitivities to Fx, Fy, Fz, Mx, My and Mz components are SFx =0.06(mV/mN), SFy =0.054(mV/mN), SFz = 0.136 (mV/mN), SMx = 1.449 (mV/mum), SMy = 1.451(mV/N\|im), and SMz = 0.751(mV/N\|im), respectively, (bias voltage Vin = 2V). The sensitivities of the SCT sensor to the forces Fz', Fx' (or Fy') and moment Mz' are 0.085 (mV/mN), 0.039 (mV/mN) and 0.004 (mV/mum), respectively. The outputs were linear and the crosstalk was small. The sensor has been mounted onto robot fingers to sense the forces from gripping operation
Starting Page	1
Ending Page	6
File Size	5548734
Page Count	6
File Format	PDF
ISBN	1424407176
DOI	10.1109/MHS.2006.320271
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2006-11-05
Publisher Place	Japan
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Fabrication Tactile sensors Robot sensing systems Fingers Magnetic force microscopy Force sensors Sensor phenomena and characterization Piezoresistance Crystallization Silicon
Content Type	Text
Resource Type	Article

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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