NDLI: An Electromagnetic Actuator Using a Cylindrical Coil Created wilth 3D X-ray Lithography and Metallization Techniques

Content Provider	IEEE Xplore Digital Library
Author	Matsumoto, Y. Yamashita, S. Noda, D. Hattori, T.
Copyright Year	2006
Description	Author affiliation: Lab. of Adv. Sci. & Technol. for Ind., Hyogo Univ. (Matsumoto, Y.; Yamashita, S.; Noda, D.; Hattori, T.)
Abstract	The demand for microactuators is increasing recently. The key technology to realizing practical microactuators is microfabrication process. In the production of microminiature components, the technologies for processing high-aspect-ratio structures are essential. As one of these technologies, the LIGA (German acronym for lithographite, galvanoformung and abformung) process is widely known. Our laboratory researches the LIGA process to three-dimensional microfabrication and established the cylindrical-micro coil production process. In this paper, we have fabricated the cylindrical-microcoil for to the solenoidal electromagnetic type microactuator. We designed and analyzed microactuators, and fabricated and evaluated microactuator coils produced by the combination of three-dimensional X-ray lithography and level copper plating. We succeeded in creating threaded groove-shaped structures (10 mum line width, 20 mum pitch, and aspect ratio of 5) on the surface of an acrylic pipe by means of three-dimensional X-ray lithography. The processing technology enables the formation of thin-wire coil lines whose current paths feature a large allowable current-carrying capacity, enabling the production of miniature, high-output microactuators
Starting Page	1
Ending Page	6
File Size	5564255
Page Count	6
File Format	PDF
ISBN	1424407176
DOI	10.1109/MHS.2006.320225
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2006-11-05
Publisher Place	Japan
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Coils X-ray lithography Metallization Microactuators Piezoelectric actuators Laboratories Production Force measurement Resists Copper
Content Type	Text
Resource Type	Article

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