NDLI: High-frequency high-Q micro-mechanical resonators in thick epipoly technology with post-process gap adjustment

Content Provider	IEEE Xplore Digital Library
Author	Galayko, D. Kaiser, A. Legrand, B. Collard, D. Buchaillot, L. Combi, C.
Copyright Year	2002
Description	Author affiliation: IEMN-ISEN, Lille, France (Galayko, D.)
Abstract	This paper presents high-Q high-frequency lateral-mode clamped-clamped beam micro-resonators driven by parallel-plate electrostatic transducers fabricated in a thick epipoly micromachining technology. An innovative approach is employed to reduce an intrinsically high transducer gap value of more then 3.0 /spl mu/m (determined by the need of 15 /spl mu/m thickness structural layer etching) down to 0.2-0.4 /spl mu/m after the fabrication. This is achieved by employing an electrostatic motor that approaches actuating and sensing electrodes close to the resonator. The electrode motor is driven with 30 V DC voltage, without any DC current consumption. Two resonators having a resonance frequency of 10 MHz have been fabricated with gap values of respectively 0.2 and 0.4 /spl mu/m. A comparative analysis of performances of the two resonators is given in the paper.
Sponsorship	IEEE
Starting Page	665
Ending Page	668
File Size	504058
Page Count	4
File Format	PDF
ISBN	0780371852
ISSN	10846999
DOI	10.1109/MEMSYS.2002.984358
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2002-01-24
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Electrostatics Transducers Electrodes Micromachining Etching Fabrication DC motors Voltage Resonance Resonant frequency
Content Type	Text
Resource Type	Article
Subject	Condensed Matter Physics Electronic, Optical and Magnetic Materials Mechanical Engineering Electrical and Electronic Engineering

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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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