NDLI: A double-sided single-chip wireless pressure sensor

Content Provider	IEEE Xplore Digital Library
Author	DeHennis, A. Wise, K.D.
Copyright Year	2002
Description	Author affiliation: Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA (DeHennis, A.)
Abstract	This paper presents the design and realization of a single-chip wireless pressure sensor implementing battery-free passive telemetry for transcutaneous pressure monitoring. The device is realized using a double-sided silicon-on-glass process integrating a high-Q inductor and a capacitive pressure transducer on opposite sides of a glass substrate. Batch-fabricated gold beam-lead inter-connects provide low-impedance connections from the front to the back of the glass die. The fabricated device measures 6 mm/spl times/6 mm/spl times/0.5 mm, and can be read out at distances greater than 3 cm over a pressure range of 400 mmHg to 1000 mmHg.
Sponsorship	IEEE
Starting Page	252
Ending Page	255
File Size	508214
Page Count	4
File Format	PDF
ISBN	0780371852
ISSN	10846999
DOI	10.1109/MEMSYS.2002.984250
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2002-01-24
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Wireless sensor networks Inductors Telemetry Coupling circuits Mutual coupling Resonant frequency Glass Biomedical measurements Pressure measurement Log periodic antennas
Content Type	Text
Resource Type	Article
Subject	Condensed Matter Physics Electronic, Optical and Magnetic Materials Mechanical Engineering Electrical and Electronic Engineering

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