NDLI: Fabrication of electrostatic resonators with monocrystalline 3C-SiC grown on silicon

Please wait, while we are loading the content...

2015 International Semiconductor Conference (CAS)

2014 International Semiconductor Conference (CAS)

CAS 2013 (International Semiconductor Conference)

CAS 2012 (International Semiconductor Conference)

CAS 2011 Proceedings (2011 International Semiconductor Conference)

CAS 2010 Proceedings (International Semiconductor Conference)

2009 International Semiconductor Conference

2008 International Semiconductor Conference

2007 International Semiconductor Conference

2006 International Semiconductor Conference

CAS 2005 Proceedings. 2005 International Semiconductor Conference, 2005.

Volume 2 - 2005

2005 International Semiconductor Conference

2005 International Semiconductor Conference

Paper Review Board

Spin-orbit interaction and spintronics effects in semiconductor structures driven by interband coupling through optical phonon like displacements

Nanostructured TiO/sub 2/ for solar energy conversion

Piezoelectric properties of bismuth modified lead titanate ceramics

Ba/sub 1-x/Sr/sub x/TiO/sub 3/ ceramics for tunable microwave devices

Thermoelectric power of p-doped PbTe semiconductor microwires with resonant states of thallium impurities

Fabrication nanotips array for thermoelectric coolers using NERCOM process

Cylindrical thermoelectric microwires under radial electric field effect

Photoelectrode materials of tungsten oxide (WO/sub 3/) for water splitting

On the luminescence and structural properties of GaInNAs lattice matched to GaAs

Photoluminescence in CdIn/sub 2/O/sub 4/ and CdGa/sub 2/O/sub 4/

Modified aromatic polyimides with potential piezoelectric properties

A compact steady-state self-heating model for a thin SOI LIGBT

EEPROM fuses for mixed-signal applications: experimental optimisation of the EE fuse operating conditions

Highly efficient edge terminations for diamond schottky diodes

On the defects introduced by AC/DC degradation in SOI "smart-cut" body contact MOSFETS

Interpreting fitting parameters of temperature dependence of dark currents in some CCDs

Process dependence and characterization of Mo, Cr, Ti and W silicon Schottky diodes

Schottky diode in HV CMOS smart power technology and its demonstration for charge pump application

Modeling the behaviour of the sub-micron MOS transistors in mixed-signal integrated circuits

Silicon carbide (SiC): a short history. an analytical approach for SiC power device design

SiC junction FETs - a state of the art review

A study of the thermal oxidation of TaSi/sub 2/ and Ta/sub 2/Si silicides to form dielectric layers for MIS structures on 4H-SiC

Breakdown performances improvements of SiC diodes using high-k dielectrics

Fabrication of electrostatic resonators with monocrystalline 3C-SiC grown on silicon

Contributions to development of high power SiC-IGBT

Pulse voltage stress degradation of 4H-SiC Schottky diodes studied by I-V and noise measurements

Standard input CMOS gain stages noise analysis

Quick-start CMOS voltage reference for positive LDOs

Low power CMOS fully differential variable-gain amplifier

A multithreading architecture for low power processors

A new improved linearity active resistor using complementary functions

Temperature sensor, band-gap voltage reference and I/sup 2/C interface for CAT75

The influence of diffusion current on the zero-tc point of a MOS transistor

Membrane supported spiral inductors for up to 10 GHz filter applications

Microfluidic chip design with application in biochemistry using polymers

Thermal effects in power MOSFETs

Ellipsometric study of SiN/sub x//nc-Si/SiN/sub x/ multilayers

A parallel between differential evolution and genetic algorithms with exemplification in a microfluidics optimization problem

Synthesis and characterization of indium tin oxide and cerium dioxide thin films by sol-gel method

MOS functional device with increased transconductance

Application of Green's functions for thermal analysis of electronic circuits

MOSFET conductance modelling including distortion analysis aspects

SPICE simulations and circuit tests of digital noise reduction with MEMS inductors

The junction edge leakage current and the blocking I-V characteristics of commercial glass passivated thyristor devices

The noise-equivalent magnetic induction spectral density of magnetotransistors

A 6 bit resolution, 1 gsamples/sec digital to analog converter

Current-mode Euclidean distance circuit independent on technological parameters

Virtual environment for robots interfaces design and testing

Field-effect transistors based on organic semiconducting materials

Testing of digital circuitry using Xilinx chipscope logic analyzer

Test methods used in fpga implementation of automatic identification system

Volume 1 - 2005

2004 International Semiconductor Conference. CAS 2004 Proceedings (IEEE Cat. No.04TH8748)

2003 International Semiconductor Conference. CAS 2003 Proceedings (IEEE Cat. No.03TH8676)

Proceedings. International Semiconductor Conference

2001 International Semiconductor Conference. CAS 2001 Proceedings (Cat. No.01TH8547)

2000 International Semiconductor Conference. 23rd Edition. CAS 2000 Proceedings (Cat. No.00TH8486)

CAS '99 Proceedings. 1999 International Semiconductor Conference (Cat. No.99TH8389)

1998 International Semiconductor Conference. CAS'98 Proceedings (Cat. No.98TH8351)

1997 International Semiconductor Conference 20th Edition. CAS '97 Proceedings

1996 International Semiconductor Conference. 19th Edition. CAS'96 Proceedings

1995 International Semiconductor Conference. CAS '95 Proceedings

Fabrication of electrostatic resonators with monocrystalline 3C-SiC grown on silicon

Content Provider	IEEE Xplore Digital Library
Author	Placidi, M. Godignon, P. Mestres, N. Esteve, J. Ferro, G. Leycuras, A. Chassagne, T.
Copyright Year	2005
Description	Author affiliation: Centre Nacional de Microelectron., Barcelona (Placidi, M.; Godignon, P.; Mestres, N.; Esteve, J.)
Abstract	The development of high quality 3C-SiC layers on Si free of residual stress opens the possibility to use SiC for microsystems fabrication and to combine them with Si devices for sensor applications. A new front-side micromachining process technology for 3C-SiC layers on Si resonators has been developed. To show it feasibility several resonator cantilever or bridge test structures of various dimensions have been fabricated. The main advantage of SiC in comparison with Si lies on its higher Young's modulus (almost three times higher), which results in higher resonance frequencies and higher quality factors
Starting Page	361
Ending Page	364
File Size	2467336
Page Count	4
File Format	PDF
ISBN	0780392140
DOI	10.1109/SMICND.2005.1558800
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2005-10-03
Publisher Place	Romania
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Fabrication Electrostatics Silicon carbide Residual stresses Micromachining Bridges Testing Resonance Resonant frequency Q factor
Content Type	Text
Resource Type	Article

Central Library (ISO-9001:2015 Certified)
Indian Institute of Technology Kharagpur
Kharagpur, West Bengal, India | PIN - 721302

See location in the Map
03222 282435
Mail: support@ndl.gov.in

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in