NDLI: Self-assembly templates by selective plasma surface modification of micropatterned photoresist

Content Provider	IEEE Xplore Digital Library
Author	Jeonggi Seo Ertekin, E. Pio, M.S. Lee, L.P.
Copyright Year	2002
Description	Author affiliation: Dept. of Bioeng., California Univ., Berkeley, CA, USA (Jeonggi Seo)
Abstract	Self-assembly templates, consisting of micropatterned hydrophobic and hydrophilic regions, are fabricated using a plasma surface modification technique. With exposure to O/sub 2/ plasma, photoresist, silicon, and glass can be modified to hydrophilic surfaces. When followed by SF/sub 6/ or CF/sub 4/ plasma, the photoresist surface can be modified to hydrophobic while silicon and glass surfaces are not affected. The difference in surface energy between the hydrophilic and hydrophobic regions is large, as indicated by the differential contact angle of 120/spl deg/ between the two regions for wetting with water. Photonic crystals are made from colloidal solutions and protein patterning is demonstrated using self-assembly templates made by selective plasma surface modification. The maximized surface energy difference between substrate and template patterning allows ideal self-assembly of photonic crystals and selective attachment of proteins.
Sponsorship	IEEE
Starting Page	192
Ending Page	195
File Size	416405
Page Count	4
File Format	PDF
ISBN	0780371852
ISSN	10846999
DOI	10.1109/MEMSYS.2002.984237
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2002-01-24
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Self-assembly Resists Plasma applications Photonic crystals Proteins Silicon Glass Lenses Microoptics Fabrication
Content Type	Text
Resource Type	Article
Subject	Condensed Matter Physics Electronic, Optical and Magnetic Materials Mechanical Engineering Electrical and Electronic Engineering

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

Fabrication of photoresist microlens arrays

Suspended Photoresist Thin Film for Fabrication of Through Silicon Vias

Fabrication of Nanopillars based on Silicon Oxide Nanopatterns Synthesized in Oxygen Plasma Removal of Photoresist

Formation of micro-lens by reflow of dual photoresist

Refractive collimating microlens arrays by surface tension self-assembly

Microlens fabrication by the modified LIGA process

A novel method to fabricate lensed optical fiber with SU-8 photoresist for efficient coupling to high-power laser diodes

Self-Assembled High NA Microball Lens Arrays

Polyimide as the pedestal of batch fabricated micro-ball lens and micro-mushroom array

Self-assembly templates by selective plasma surface modification of micropatterned photoresist

Similar Documents

Fabrication of photoresist microlens arrays

Suspended Photoresist Thin Film for Fabrication of Through Silicon Vias

Fabrication of Nanopillars based on Silicon Oxide Nanopatterns Synthesized in Oxygen Plasma Removal of Photoresist

Formation of micro-lens by reflow of dual photoresist

Refractive collimating microlens arrays by surface tension self-assembly

Microlens fabrication by the modified LIGA process

A novel method to fabricate lensed optical fiber with SU-8 photoresist for efficient coupling to high-power laser diodes

Self-Assembled High NA Microball Lens Arrays

Polyimide as the pedestal of batch fabricated micro-ball lens and micro-mushroom array

Self-assembly templates by selective plasma surface modification of micropatterned photoresist