NDLI: A large stepwise motion electrostatic actuator for a wireless microrobot

Content Provider	IEEE Xplore Digital Library
Author	Basset, P. Kaiser, A. Bigotte, P. Collard, D. Buchaillot, L.
Copyright Year	2002
Description	Author affiliation: Dpt. ISEN, UMR CNRS, Villeneuve d'Ascq, France (Basset, P.)
Abstract	An original large stepwise motion electrostatic microactuator for a wireless microrobot using a distributed Ciliary Motion System (CMS) [1] is presented. Coventorware/sup TM/ cosolver simulations have shown x-displacement of 240 nm for one actuation step. Design of the antennas for inductive powering has been optimized in order to maximize the energy transfer. 24 /spl mu/m gold electroplated hollow micro-coils have been fabricated on an epoxy substrate as receiver antennas. Q-factor of 29 at 13.56 MHz and induced voltage up to 100 V on a 1 k/spl Omega/ load has been obtained. Remote actuation of an array of actuators supporting a 0.25 mm/sup 2//380 /spl mu/m-thick piece of silicon has been successfully demonstrated with a pull-in voltage of 80 V.
Sponsorship	IEEE
Starting Page	606
Ending Page	609
File Size	501947
Page Count	4
File Format	PDF
ISBN	0780371852
ISSN	10846999
DOI	10.1109/MEMSYS.2002.984344
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2002-01-24
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Electrostatic actuators Receiving antennas Voltage Microactuators Collision mitigation Design optimization Energy exchange Gold Q factor Silicon
Content Type	Text
Resource Type	Article
Subject	Condensed Matter Physics Electronic, Optical and Magnetic Materials Mechanical Engineering Electrical and Electronic Engineering

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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