NDLI: A New Fabrication Method of NiCr/NiSi Thin-film Thermocouple Sensor for Workpiece Temperature Measurement in Chemical Explosive Material Machining

Content Provider	IEEE Xplore Digital Library
Author	Qiyong Zeng Baoyuan Sun Xinlu Deng Jun Xu
Copyright Year	2006
Description	Author affiliation: Coll. of Mechatronical Eng., China Jiliang Univ., Hangzhou (Qiyong Zeng)
Abstract	With increasing cutting speeds being used in machining operations, the thermal aspects of cutting have become more important. A new fabrication method of nickel-chrome versus nickel-silicon thin-film thermocouple-rf magnetron sputtering is presented. The thin film thermocouples have been directly deposited inside high speed steel cutters and the thickness of the thermocouple junction is only 1.6 mum. The great efforts of this article are devoted to the comparison study between this kind of fabrication method and multiple arc ion plating method introduced in the authors' former work. Static and dynamic calibrations of the NiCr/NiSi thin-film thermocouples are also presented. It is concluded that, comparing to ion plating method, the compositions of the thermocouple thin films deposited by rf magnetron sputtering are closer to those of the alloy targets; the Seebeck coefficient of the thin-film thermocouples are closer to those of standard K-type wire thermocouples; and the thin film thermocouple can respond faster
Starting Page	8374
Ending Page	8377
File Size	178103
Page Count	4
File Format	PDF
ISBN	1424403324
DOI	10.1109/WCICA.2006.1713610
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2006-06-21
Publisher Place	China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Chemical sensors Fabrication Thin film sensors Temperature sensors Thermal sensors Temperature measurement Explosives Machining Sputtering Magnetic sensors NiCr/NiSi Thin-film thermocouple Workpiece temperature rf magnetron sputtering
Content Type	Text
Resource Type	Article

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