NDLI: Thermo-sensitive Quartz Resonator Based on Tuning Fork Technology

Content Provider	IEEE Xplore Digital Library
Author	Jun Xu Hong Ai Bo You Xin Li
Copyright Year	2006
Description	Author affiliation: Coll. of Autom., Harbin Univ. of Sci. & Technol. (Jun Xu; Hong Ai; Bo You)
Abstract	A novel high-performance sensor technology for measuring and monitoring temperature is described. This type of temperature sensor using a quartz tuning fork resonator is inherently insensitive to noise because the output is a frequency shift cause by an external temperature. The output can easily be converted into a digital signal and directly connected to a microcontroller without an A-D converter. Fabrication process for quartz tuning forks is realized by employing photolithography and selective etching a method. The operation of a thermo-sensitive quartz tuning-fork resonator and the frequency shift caused by an external temperature has been explained. The temperature sensor is designed with a doubly rotated cut show nearly a linear response with sensitivity about 70ppm/degree within temperature range from -50 degree to 200 degree, the numerical and experimental samples all indicated accuracies of 0.05 degree and a reasonable response time
Starting Page	5049
Ending Page	5053
File Size	157189
Page Count	5
File Format	PDF
ISBN	1424403324
DOI	10.1109/WCICA.2006.1713350
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2006-06-21
Publisher Place	China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Vibrations Temperature sensors Temperature measurement Sensor phenomena and characterization Microcontrollers Fabrication Lithography Etching Resonant frequency Temperature distribution Etching method Temperature sensor Tuning fork Quartz resonator
Content Type	Text
Resource Type	Article

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