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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Lewis, A.P. Chianrabutra, C. Liudi Jiang Suan Hui Pu McBride, J.W. |
| Copyright Year | 2013 |
| Description | Author affiliation: Fac. of Eng. & the Environ., Univ. of Southampton, Southampton, UK (Lewis, A.P.; Chianrabutra, C.; Liudi Jiang; Suan Hui Pu; McBride, J.W.) |
| Abstract | The use of gold-coated multi-walled carbon nanotube (Au/MWCNT) composites have been shown to extend the life of electrical contacts, in previous work. Due to the long lifetimes (which are of the order of $10^{6}$ up to $10^{8}$ cycles) the lifetime testing tends to be highly time consuming. In this work we discuss the design and development of an electrostatically actuated MEMS cantilever beam which enables testing at higher frequencies than our previous experimental rig. Following calculations using fundamental cantilever beam equations, a computational model of the designed beam was developed to accurately predict the characteristics of the beam, including the resonant frequency, pull-in voltage and contact force. Where possible the values from the model have been compared with the fabricated MEMS cantilever beam. A MEMS-based electrostatically actuated cantilever beam has been fabricated and incorporated with Au/MWCNT composite surfaces to form a MEMS switch test platform. Initial results show the improved performance over a PZT based test platform. |
| Sponsorship | IEEE Singapore Sect. |
| Starting Page | 472 |
| Ending Page | 478 |
| File Size | 2068516 |
| Page Count | 7 |
| File Format | |
| e-ISBN | 9781479928347 |
| DOI | 10.1109/EPTC.2013.6745765 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2013-12-11 |
| Publisher Place | Singapore |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Gold Contacts Structural beams Micromechanical devices Switches Silicon Resonant frequency |
| Content Type | Text |
| Resource Type | Article |
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