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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Westerheim, A.C. Yu-Jahnes, L.S. Anderson, A.C. |
| Copyright Year | 1965 |
| Abstract | It is pointed out that in situ off-axis magnetron sputtering of superconducting Y-Ba-Cu-O (YBCO) is the simplest method for producing high-quality thin films. However, the method is not completely understood and the properties of films can vary widely among similarly configured systems and even from run-to-run in a given system. The authors have performed a series of experiments aimed at understanding and controlling the off-axis sputtering process. Film properties such as lattice parameter, T/sub c/, and surface morphology were measured as a function of substrate temperature, oxygen pressure, and substrate position. A method to accurately measure the substrate surface temperature has been developed, thus eliminating this as an unknown parameter. Under certain conditions, good films can be deposited at oxygen partial pressures well below the Hammond-Bormann oxygen-pressure-vs.-temperature stability curve for superconducting YBCO, showing the importance of the generation of activated oxygen in the sputtering chamber. Optical emission has confirmed the presence of atomic oxygen. Additional studies of the oxidation of YBCO films in molecular and atomic oxygen generated by an electron cyclotron resonance plasma show that the presence of atomic oxygen creates an equivalent pressure more than two orders of magnitude greater than molecular oxygen at that pressure. |
| Sponsorship | IEEE Magnetics Society |
| Starting Page | 1001 |
| Ending Page | 1005 |
| Page Count | 5 |
| File Size | 590140 |
| File Format | |
| ISSN | 00189464 |
| Volume Number | 27 |
| Issue Number | 2 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 1991-03-01 |
| Publisher Place | U.S.A. |
| Access Restriction | One Nation One Subscription (ONOS) |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Sputtering Yttrium barium copper oxide Superconducting films Substrates Optical films Superconducting magnets Surface morphology Plasma temperature Atom optics Atomic layer deposition |
| Content Type | Text |
| Resource Type | Article |
| Subject | Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering |
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