NDLI: Fabrication of Ceramic High Temperature Microsystems

Content Provider	The American Society of Mechanical Engineers (ASME) Digital Collection
Author	Kellie, Benjamin Prakash, Shaurya
Copyright Year	2011
Abstract	This paper reports on recent advances in fabricating alumina-based ceramic microcombustors for applications in high temperature microsystems. We have fabricated alumina structures with critical dimensions on the order of 1 mm or less by using a gel-casting approach with poly(vinyl) alcohol (PVA) as a non-toxic polymeric binder. Polymer binder content, alumina weight ratio, and thermal cycling were varied systematically to develop microcombustors that can sustain stable flames in a spiral configuration allowing for better mixing of fuel and oxidizer streams for a more uniform heat output. The polymer binder and cross-linker content varied between 10 and 20% (w/v to DI water) and 50 and 100% (w/w to PVA) respectively to obtain an optimal binder content. The weight ratio of alumina (w/w 30–50%) in the binder solution was evaluated with 1.1 micron particles to observe the effect on the green body density. The green body was then fired in a high temperature furnace in air to burn-out the polymeric binder and sinter the ceramic. Heating and cooling rates, maximum operation temperature, and dwell times were evaluated to obtain high density ceramic structures with 50% or higher alumina content. Thermal stress and heating and cooling rates appear to be major parameters to control in order to obtain high-quality microcombustors.
Starting Page	281
Ending Page	285
Page Count	5
File Format	PDF
ISBN	9780791854976
DOI	10.1115/IMECE2011-64476
Volume Number	Volume 11: Nano and Micro Materials, Devices and Systems; Microsystems Integration
Conference Proceedings	ASME 2011 International Mechanical Engineering Congress and Exposition
Language	English
Publisher Date	2011-11-11
Publisher Place	Denver, Colorado, USA
Access Restriction	Subscribed
Subject Keyword	Microelectromechanical systems Water Temperature Ethanol Binders (materials) Sinter (metallurgy) Dimensions Ceramics High temperature Fuels Density Casting Flames Heat Furnaces Weight (mass) Particulate matter Manufacturing Polymers Heating and cooling Thermal stresses
Content Type	Text
Resource Type	Article

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