NDLI: Finite Volume Method for Structural Analysis of RF MEMS Devices Using Theory of Plates

Content Provider	The American Society of Mechanical Engineers (ASME) Digital Collection
Author	Das, Shankhadeep Sanjay, R. Mathur Jayathi, Y. Murthy
Copyright Year	2011
Abstract	Radio-frequency microelectromechanical systems (RF MEMS) have wide applicability in contact actuators and capacitive switches. In these devices, the membrane deforms under non-linearly varying electrostatic actuation. It is advantageous to adopt a single comprehensive numerical framework to model these coupled systems. Frequently, the membranes are very thin with aspect ratios as high as 1:500. We model these membranes using the theory of plates and make use of the Mindlin-Reissner plate theory. In this paper, we describe a cell-centered finite volume approach to discretize the governing equations. The discretized equations are linearized completely, and the resulting set of algebraic equations is solved using a biconjugate gradient stabilized (BCGSTAB) solver. Transverse deflection and bending moment distributions are first described for canonical test problems, verifying the accuracy of the method. Results are then presented in this paper for a fixed-fixed MEMS device, modeled as a thin plate, under electrostatic actuation.
Starting Page	107
Ending Page	117
Page Count	11
File Format	PDF
ISBN	9780791854976
DOI	10.1115/IMECE2011-62617
Volume Number	Volume 11: Nano and Micro Materials, Devices and Systems; Microsystems Integration
Conference Proceedings	ASME 2011 International Mechanical Engineering Congress and Exposition
Language	English
Publisher Date	2011-11-11
Publisher Place	Denver, Colorado, USA
Access Restriction	Subscribed
Subject Keyword	Microelectromechanical systems Actuators Plate theory Membranes Algebra Deflection Switches Plates (structures) Finite volume methods Structural analysis
Content Type	Text
Resource Type	Article

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