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| Content Provider | IET Digital Library |
|---|---|
| Author | Jeong, Eun Wook Kim, Dong Yong Choi, In Kyun Park, Hong Seok Hui, Kwun Nam Cho, Young Rae |
| Abstract | Evaluation of gas permeation properties through barrier layers is important for the development of flexible organic light-emitting devices (FOLEDs). In this reported work, an helium (He) leak detector was used in a novel permeation test for metallic barrier layers. Aluminium (Al) or chromium (Cr) film was deposited as a barrier layer onto a polyethylene terephthalate (PET) substrate using a magnetron sputtering system. For the samples of PET substrates with Al and Cr films at thicknesses of 200 nm, the He pressures were 3.1 × 10−6 and 1.3 × 10−5 Torr, respectively, as measured via He detector testing. The poor permeation blocking by the Cr film was because of microcracks. The He pressure for samples with 1 000 nm thick Al coating and for Al foil (30 μm) showed different values of 3.2 × 10−8 and 1.1 × 10−10 Torr, respectively, which indicated high sensitivity in a low permeation range. The high sensitivity in permeation properties measured by He detector testing reflected the qualities of He that include one of the lightest weights known to science and a very small size. This He detector test will be useful in the development of long-life FOLEDs, as it will aid the measuring of the gas permeation properties of barrier layers that are highly effective in blocking water vapour. |
| Starting Page | 866 |
| Ending Page | 868 |
| Page Count | 3 |
| Volume Number | 9 |
| e-ISSN | 17500443 |
| Issue Number | Issue 12, Dec (2014) |
| Alternate Webpage(s) | https://digital-library.theiet.org/content/journals/mnl/9/12 |
| Alternate Webpage(s) | https://digital-library.theiet.org/content/journals/10.1049/mnl.2014.0397 |
| Journal | Micro & Nano Letters |
| Publisher Date | 2014-10-02 |
| Access Restriction | Open |
| Rights Holder | © The Institution of Engineering and Technology |
| Subject Keyword | Aluminium Aluminium Film Blocking Water Vapour Chromium Chromium Film Coatings Deposition by Sputtering Detector Testing Epitaxy Flexible Organic Light-emitting Device Foil FOLED Gas Permeation Property Helium Leak Detector Method Light Emitting Device Magnetron Sputtering System Metallic Barrier Layer Metallic Thin Film Microcracks Organic Electronic Device Permeation Blocking Permeation Testing PET Substrates Polyethylene Terephthalate Substrate Size 1000 Nm Size 200 Nm Sputter Deposition Structure Thin Film Growth |
| Content Type | Text |
| Resource Type | Article |
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