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| Content Provider | IET Digital Library |
|---|---|
| Author | Shu, Lin Jiang, Jianying Peng, Bin Wang, Yu Liu, Xingzhao |
| Abstract | A novel surface acoustic wave (SAW) resonator integrated on a metal substrate is presented. The devices were fabricated on the aluminium nitride (AlN) thin films deposited by mid-frequency magnetron sputtering on polished TC4 titanium alloy substrates. Using a two-step growth method, AlN film with a full-width at half-maximum of 4.1° had been prepared. The AlN film SAW resonator shows a resonance frequency of 129 MHz and an electromechanical coupling coefficient of 0.28%. The measurement results agree well with the simulation results. This integrated SAW resonator can be used as a good strain sensor in metal structure health monitoring. |
| Starting Page | 379 |
| Ending Page | 380 |
| Page Count | 2 |
| ISSN | 00135194 |
| Volume Number | 51 |
| e-ISSN | 1350911X |
| Issue Number | Issue 5, Mar (2015) |
| Alternate Webpage(s) | https://digital-library.theiet.org/content/journals/el/51/5 |
| Alternate Webpage(s) | https://digital-library.theiet.org/content/journals/10.1049/el.2014.3495 |
| Journal | Electronics Letters |
| Publisher Date | 2015-02-19 |
| Access Restriction | Open |
| Rights Holder | © The Institution of Engineering and Technology |
| Subject Keyword | Acoustic Wave Device AlN Aluminium Compound Aluminium Nitride Thin Films Electromechanical Coupling Coefficient Frequency 129 MHz Integrated SAW Resonator Metal Structure Health Monitoring Metal Substrate Midfrequency Magnetron Sputtering Resonance Frequency Sputter Deposition Strain Sensor Surface Acoustic Wave Parametric Amplifier Surface Acoustic Wave Resonator TC4 Titanium Alloy Substrates Thin Film Circuit Thin Film Device Titanium Alloy Wide Band Gap SemiConductor |
| Content Type | Text |
| Resource Type | Article |
| Subject | Electrical and Electronic Engineering |
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