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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Abe, S. Miyazawa, Y. Nakajima, Y. Hanajiri, T. Toyabe, T. Sugano, T. |
| Copyright Year | 2009 |
| Description | Author affiliation: Bio-Nano Electronics Research Centre, Toyo University, 2100 Kujirai, Kawagoe, Saitama 350-8585, Japan (Abe, S.; Miyazawa, Y.; Nakajima, Y.; Hanajiri, T.; Toyabe, T.; Sugano, T.) |
| Abstract | The Metal-Oxide-Semiconductor Field-Effect-Transistor (MOSFET) fabricated on a Silicon-On-Insulator (SOI) substrate is effective to suppress Short Channel Effect (SCE), and is one of the most promising electron devices for Very Large Scale Integration (VLSI) circuits for higher speed, higher integration density, and lower power consumption, and it has been already demonstrated that SCE in deep submicron SOI MOSFETs comes from Drain-Induced Barrier Lowering (DIBL) at SOI/Buried OXide (BOX) interface by the author's group. This paper elucidates the roles of permittivity and thickness of BOX layers in suppressing the DIBL in SOI MOSFETs by performing numerical device simulations of SOI MOSFETs with various permittivity and thickness of BOX systematically and by visualizing distribution of dielectric flux lines and current flow lines as well as contour potential lines in MOSFETs. |
| Starting Page | 329 |
| Ending Page | 332 |
| File Size | 1090908 |
| Page Count | 4 |
| File Format | |
| ISBN | 9781424437047 |
| DOI | 10.1109/ULIS.2009.4897602 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2009-03-18 |
| Publisher Place | Germany |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Silicon on insulator technology Energy consumption Circuits Data visualization Very large scale integration Numerical simulation Permittivity Electron devices MOSFETs Thickness control |
| Content Type | Text |
| Resource Type | Article |
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