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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Gerharz, J. Mussler, G. Moers, J. Rinke, G. Trellenkamp, S. Grutzmacher, D. |
| Copyright Year | 2009 |
| Description | Author affiliation: Institute of Bio- and Nanosystems, IBN1-HN, Forschungszentrum Julich, D-52425, Germany (Gerharz, J.; Mussler, G.; Moers, J.; Rinke, G.; Trellenkamp, S.; Grutzmacher, D.) |
| Abstract | This paper presents a silicon MOSFET device, which utilizes locally strained silicon layers for high mobility channels. By means of template-assisted self assembly of Ge-islands and Silicon overgrowth a Silicon layer is formed, which is strained on top of the very accurately placed Ge-islands and their near vicinity. The island formation in the seed holes on pre patterned substrates and the intrinsic overlay of the ebeam lithography were investigated. The island size, shape and distribution can be properly controlled up to a grid pitch of 700 nm. The intrinsic overlay of ±10nm can be maintained during device processing, which is due to the symmetry of the markers. |
| Starting Page | 177 |
| Ending Page | 180 |
| File Size | 8857205 |
| Page Count | 4 |
| File Format | |
| ISBN | 9781424437047 |
| DOI | 10.1109/ULIS.2009.4897565 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2009-03-18 |
| Publisher Place | Germany |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Germanium silicon alloys FETs Silicon germanium |
| Content Type | Text |
| Resource Type | Article |
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