NDLI: Predicting the mechanical behavior of self-deformed micromachined cantilevers

Content Provider	IEEE Xplore Digital Library
Author	Pasupuleti, A. Sahin, F. Raisanen, A. Hebding, J.L. Walter, W.W. Hirschman, K.D.
Copyright Year	2005
Description	Author affiliation: Rochester Inst. of Technol., NY, USA (Pasupuleti, A.; Sahin, F.; Raisanen, A.; Hebding, J.L.; Walter, W.W.; Hirschman, K.D.)
Abstract	This research aims at characterizing and predicting the mechanical behavior of thin film materials that are used in micro electro mechanical systems (MEMS). Micro machined bilayer cantilevers of various dimensions were fabricated and analyzed to extract models. The models designed in this process are foreseen to be an essential tool for MEMS designers as they would relate the loading parameters, material properties and geometry of the microstructures with its performance characteristics. A computational methodology based on empirical modeling was developed that enables the designer to prototype the designs before fabrication. The proposed model generates accurate material properties applicable at the microscopic level, thereby accelerating the design and development process. The performance of the proposed model was compared to the experimental values and the results were found to be very encouraging.
Sponsorship	IEEE - CPMT
Starting Page	254
Ending Page	258
File Size	873633
Page Count	5
File Format	PDF
ISBN	0780390628
DOI	10.1109/ESIME.2005.1502810
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2006-04-18
Publisher Place	Germany
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Micromechanical devices Process design Material properties Transistors Mechanical systems Solid modeling Geometry Microstructure Prototypes Fabrication
Content Type	Text
Resource Type	Article

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