NDLI: Application of nonlinear driving in frequency matching of tunneling gyroscope

Content Provider	IEEE Xplore Digital Library
Author	Lingyun Wang Xiaohui Du Yuanzhe Su Zhan Zhan Wenjia Zuo Daoheng Sung
Copyright Year	2012
Description	Author affiliation: Xiamen University, CHINA (Xiaohui Du; Yuanzhe Su; Zhan Zhan; Wenjia Zuo) \|\| Department of Mechanical and Electrical Engineering, Xiamen University, CHINA (Lingyun Wang; Daoheng Sung)
Abstract	The nonlinear vibration behavior of driving mode of a tunneling gyroscope is measured and simulated. Based upon these testing results, a new method for frequency matching is presented. Compared to traditional harmonic vibration, large amplitude and wide shift resonance frequency could be obtained in stable region of nonlinearity by using this approach, especially, in this region gyroscope could spontaneously vibrate at a certain driven frequency without needing sweep-up frequency excitation. In our tunneling gyroscope, the vibration amplitude changes from 1µm to 5µm at jumping-up point J′ with the amplitude of the excitation electrostatic force increasing. At the same time, the resonant frequency of driving mode can be shifted from nature frequency 1.81 kHz to 2.2 kHz, which is much closed to the resonant frequency of sensing mode (2.23 kHz). This effect can be used as an alternative approach to trim the frequency and eliminate the frequency mismatching for the post-fabrication tunneling gyroscope, eventually, higher sensitivity could be gotten than using linear driving mode.
Starting Page	571
Ending Page	574
File Size	1051941
Page Count	4
File Format	PDF
ISBN	9781467311229
e-ISBN	9781467311243
DOI	10.1109/NEMS.2012.6196840
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2012-03-05
Publisher Place	Japan
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Vibration measurement Nanoelectromechanical systems Thickness measurement Micromechanical devices Fitting frequency mismatching tunneling gyroscope nonlinear effect electrostatic force
Content Type	Text
Resource Type	Article

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