NDLI: Silicon-Polymer Electro-thermal bimorph actuators with SiC bottom-layer for large out-of-plane motion and improved power efficiency

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10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems

The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)

The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems

2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)

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IEEE-NEMS 2012 program schedule

Table of contents

NEMS based tools for nanoscience and atomic clocks

Beyond Watson and Crick: Programming DNA self-assembly for nanofabrication

Recent advances on nano-materials for advanced packaging applications

Printed carbon nanotube devices and their applications

Sensing and noise characteristics of si-nanowire ion-sensitive-field-effect-transistors for future biosensor applications

Atomic resolution nanofabrication and dynamic characterization

Nanopatterning by phase change nanolithography

Portable e-nose based on polymer/CNT sensor array for protein-based detection

Multilayer graphene growth by a metal-catalyzed crystallization of diamond-like carbon

Chemical vapor deposition of nanocrystalline graphene directly on arbitrary high-temperature insulating substrates

Characterization of strain fields in graphene films

Transfer-free fabrication of suspended graphene grown by chemical vapor deposition

Photovoltaic response of N-doped graphene-based photodetector

Development of roll press UV imprint process for replication of micro lens array on the large and thin quartz substrate

Fabrication metal roller mold with sub-micrometer feature size based on contact printing photolithography

Fabrication of metal embedded photo-mask for sub-micrometer scaled photolithography and patterning sapphire substrate

Metal contact printing photolithography for fabricating sub-micrometer patterned sapphire substrates in light-emitting diodes

Nano-scale mechanical relays fabricated by nanoimprint technology

A facile nanowire fabrication approach based on edge lithography

Hybrid mask lithography for fabrication of micro-pattern with nano-pillars

Adaptable chip-level microfluidic packaging for a micro-scale gas chromatograph

Detecting vapor traces of explosives using a self-assembled mono layer on a surface-modified MEMS capacitor and CMOS electronics

A high heating efficiency two-beam microhotplate for catalytic gas sensors

Vibration mode localization in coupled beam-shaped resonator array

Piezoelectrically actuated Circular Diaphragm Resonator mass sensors

A carbon nanotube network conjugated by semiconductor nanoparticles with defined nanometer-scaled gaps

Closed-looped nano stimulation microscope for living cell membrane

Pyramidal nanowire tip for atomic force microscopy and thermal imaging

A pyrex nanochannel device fabricated by AFM nanolithography

Effect of nonlinear vibration on double region of synchronized frequency responses in mechanically coupled beam-shaped oscillator system

Characterization of a multi-layered MEMS pressure sensor using piezoresistive silicon nanowire within large measurable strain range

A novel stretchable CMUT array using liquid-metal electrodes on a PDMS substrate

Miniature pyranometer with asteroid shape thermopile

Design and fabrication of thin-film aluminum microheater and nickel temperature sensor

Micro device array design and fabrication in monolithic MEMS SoC

Integration the back-side inclined exposure technology to fabricate the 45° k-type prism with nanometer roughness

Study on piezoelectric properties of near-field electrospinning PVDF/MWCNT nano-fiber

Local ablation by micro-electric knife

In-vitro transgenic mice liver tissue culture via hydrodynamic flow perfusion bioreactor

High quality factor parylene-based intraocular pressure sensor

Light-addressable electrochemical micropatterning of cell-encapsulated alginate hydrogels for cell-based microarray

A free-standing and flexible parylene PCR device

The effect of Cytochalasin D on F-Actin behavior of single-cell electroendocytosis using multi-chamber micro cell chip

Cryogenic frozen device for hepatocyte culture and responses

3D microstructure integrated bioreactor system for transgenic mice thick liver tissue culture

Experimental investigation of bulk response of cells on optoelectronic dielectrophoresis chip

PEGDA-based photocrosslinking platform for real time cell trapping

Unified theory to evaluate the effect of concentration difference and Peclet number on electroosmotic mobility error of micro electroosmotic flow

Blood vessels by fractal gelatin

Design, simulation, and verification of fluidic light-guide chips with various geometries of micro polymer channels

Separation of dendritic and T cells using electrowetting and dielectrophoresis

Development of microbead-based affinity biosensor by insulator-based dielectrophoresis

Difference proportional cell contact platform for 3D hepatocyte culture

Inducing self-rotation of Melan-a cells by ODEP

Microfluidic system for rapid detection of influenza infection by utilizing magnetic MnFe nanoparticle-based immunoassay

An optical diagnostic system using isothermal amplification technique for Phalaenopsis orchids

Automated immunoassay system based on the colorimetric detection

Three-dimensional lab-on-a-CD with enzyme-linked immunosorbent assay

3D biomimetic chip integrated with microvascular system for studying the liver specific functions

Plasma-treated switchable wettability of parylene-C surface

In situ heating to improve adhesion for parylene-on-parylene deposition

Engineering a biomimetic villus array for in vitro 3-dimensional culture of intestinal epithelial cells

Reduction of AC resistance in MEMS intraocular foil coils using microfabricated planar Litz structure

Design and fabrication of flexible parylene-based inductors with electroplated NiFe magnetic core for wireless power transmission system

Design of a small wankel engine

Fabrication of high-aspect-ratio PZT structure by nanocomposite sol-gel method for laterally-driven piezoelectric MEMS switch

Silicon-Polymer Electro-thermal bimorph actuators with SiC bottom-layer for large out-of-plane motion and improved power efficiency

Study of a novel bi-stable and easy integrated MEMS ETBS

Rapid thermal plasma deposition of transparent nanocrystalline ZnO thin films and the effects of annealing

Various carbon composite pyrolyzed polymers and their electrical characterization

Reliability prediction of 3C-SiC cantilever beams using dynamic Raman spectroscopy

Characterization of wafer-level XeF Gas-phase Isotropic Etching For MEMS Processing

Precise width control of single crystalline silicon nano-wall structure based on wet etching process on (111) wafer

Conductive micro silver wires via aerosol deposition

Dry mechanical liftoff technology for metallization on parylene-C using SU-8

Fabrication of nanogap electrode using electromigration method during metal deposition

Pseudo-spin filter in metallic single-walled carbon nanotubes

Top-down vs. bottom-up coarse-graining of graphene and CNTs for nanodevice simulation

Electrowetting droplets investigated with smoothed particle hydrodynamics and moving least squares

Processing of 3D multilevel SU-8 fluidic network assisted by PerMX dry-photoresist lamination

Conductive and transparent gel microstructures fabricated by inkjet printing of ionic liquid based fluids

Nanomechanical DNA origami devices as versatile molecular sensors

Gold-coated polystyrene bead array and the investigation of their plasmon coupling abilities

Development of microfabricated phononic crystal resonators based on two-dimensional silicon slab

Electric field design of metallic sub-wavelength hole arrays for optical permittivity sensing

A stable frequency references platform based on packaged microsphere-taper coupling system

Arrayed metallic micro/nano particles for localized surface plasmon resonance based on metal contact transfer lithography

Ligand-exchange of TOPO-capped CdSe quantum dots with quinuclidines

A study of nano-structured manganese dioxides and their composites as electrode materials for micro supercapacitors

CoNiMnP-AAO hard magnetic nanocomposite film for MEMS applications

An adhesion strength measurement method for particle transfer and assembly in dry environment

Automatic somatic cell operating process for nuclear transplantation

High speed enucleation of oocyte using magnetically actuated microrobot on a chip

Catalytic Nano-mobile Robot with finely designed geometry

Design and fabrication of diffractive phase element for minimizing the focusing spot size beyond diffraction limit

Enhancing light output of GaN-based light-emitting diodes with nanoparticle-assembled on-top layers

The chromatic dispersion module with large chromatic focal shift

A multi-view reflective three-dimensional display

Use bionic microlens array and CMOS image sensor for three-dimensional motion detection

A high sensitivity and low-cost polycarbonate (PC)-based biosensor

An electro-enzymatic flexible molecular lactate sensor

Spontaneous motion of a water droplet on hydrophilic and curvature gradient conical-shaped surfaces

Electric manipulations of hydrogel on a digital microfluidic platform

Microbubble and microplasma manipulations for gas analyses

Three-dimensional digital microfluidics and applications

Specific design and implementation of a piezoelectric droplet actuator for evaporative cooling of free space

Micro-droplet formation with non-Newtonian solutions in microfluidic T-junctions with different inlet angles

Investigation of electrical properties of DNA-attached carbon nano-particles for biological applications

Electrical performance of micro-assembled beads under different temperatures and loadings

Vertical deposition of nanospheres on the open sidewalls of silicon pillars

Nanoscale laser writing of Indium-Tin-Oxide nanowires

Formation and interaction of micro/nano multi-scale structures

A high efficient POM micro-methanol reformer

Proton exchange membranes based on aryl epoxy resin for fuel cells operated at elevated temperatures

Material nonlinearity limits on a Lamé-mode single crystal bulk resonator

Evidence on the impact of T-shaped tether variations on Q factor of bulk-mode square-plate resonators

Analysis of air damping in micromachined resonators

Benchmarking the passive differential input technique to shielded GSG probes

Study on thermoelastic dissipation in bulk mode resonators with etch holes

A piezoresistive normal and shear force sensor using liquid metal alloy as gauge material

Development of a novel force sensor system built with an industrial multilayer ceramic capacitor (MLCC)

Implementation of a subwavelength Bragg reflector for Terahertz applications

On sustaining robustness of molecular pathway circuits of the HSR network of E. coli under spatial configuration

Numerical simulation of CZTS thin film solar cell

On the design of subwavelength waveguiding structures for terahertz Applications

Polypyrrole (PPy) nanowire arrays entrapped with glucose oxidase biosensor for glucose detection

The electromigration investigation of Cu-Ni nanocomposites

A SWNTs thin film solar microcell prepared by simple solution-evaporation method

Investigation of particle dispersion and deposition in a channel with elliptic obstructions using lattice Boltzmann method

A study of hydrogen peroxide microfluidic fuel cells

Microfluidic circulatory system for the raise of liver urea assay

Preparation and physicochemical study of liposomes containing nicotinamide

Fabrication of controllable profile microlens array by nanoimprinting process

Analysis on 3-Dimensional spatial electric field of AFM based anodic oxidation

Scanning electron beam induced deposition for conductive tip modification

In situ study of thermal deformation of metal resistive heater on silicon nitride membrane by digital holographic microscopy

Comparison of glass etching properties between HCl and HNO solution

Surface analysis and process optimization of black silicon

Application of nonlinear driving in frequency matching of tunneling gyroscope

Integrated flexible micro pressure, temperature and flow sensors for use in pemfc

Sensitivity enhancement in SGOI nanowire biosensor fabricated by top surface passivation

A silicon-on-glass Z-axis accelerometer with vertical sensing comb capacitors

The vertical MSM diamond X-ray detector

Effect of geometrical design of support on frequency shift and energy loss of piezoelectric ring resonator applicable to liquid circumstance

Effective force generation for ECLIA composed of Si bone structure and conductive polymer flexible slider

The study of forward and reverse schottky junction for dual magnetodiode

Electrode design optimization of a CMOS fringing-field capacitive sensor

Dimensions and capillary effects of microfluidic channel for blood plasma separation

Fabrication and analysis of integrated MEMS pyramidal horn antenna for terahertz applications

Characterization of super-harmonic effect using piezoelectric film cantilever with a proof mass in the point

High-Q maintenance of microcavity by using a sealed and packaged structure

On the effect of width of metallic armchair graphene nanoribbons in plasmonic waveguide applications

The facile transferral of graphene onto interdigitated electrodes for sensing applications

Excitation of mechanical oscillations in double-carbon-nanotube system by terahertz radiation

Capillary kinetics of water in hydrophilic microscope coverslip nanochannels

A visualization study of venting gas via hydrophobic nanoporous membrane

Switching characteristic model and biochemical application analysis for electrolyte-oxide-semiconductor structure diodes

A 3D micro-channel cooling system embedded in LTCC packaging substrate

A flexible evaporation micropump with precision flow rate control for micro-fluidic systems

Nanofluidic device with self-assembled nafion membrane utilizing capillary valve

Effect of coating organic film on dropwise condensation in microgrooves with nanostructure surface

Novel core etching technique on synthesized gold nanoparticles for colorimetric detection of dopamine biosample

Fast self-resonant startup procedure for digital MEMS gyroscope system

The manufacture of micropillars with high depth-to-width ratio, and the comparison between two typical materials

Surface-modified diamond embedded in nickel matrix composite for intrinsic polishing application

Fabrication and Performance Optimization of the Microplasma Reactor with Composite Dielectrics

Fabrication of deep lateral single-crystal-silicon blaze micro-grating by Inductively-Coupled-Plasma Reactive Ion Etch

A study of tin oxide thin film gas sensors with high oxygen vacancies

In situ monitoring of temperature using flexible micro temperature sensors inside polymer lithium-ion battery

Design and simulation of fully-symmetrical resonant pressure sensor

Effect of oxidation on SGOI nanowire biosensor fabrication using Ge condensation

A capacitive readout circuit with DC sensing method for micromachined gyroscopes

The optimal vibrational shear stress for bovine endothelial cell proliferation

An optimized fabrication of high yield CMOS-compatible silicon carbide capacitive pressure sensors

Study of thin film adhesion properties of multilayer flexible electronics composites

Using a canny-edge-detection based method to characterize in-plane micro-actuators

Thermal switch and variable capacitance designed for micro electrostatic converter by using CMOS MEMS process

A research of the bandwidth of a mode-matching MEMS vibratory gyroscope

Graphene nanoribbon based AM demodulator of terahertz radiation

Atomic layer deposited protective coatings for integrated MEMS flow sensor

2011 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems

2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems

2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems

2008 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems

2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems

2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Silicon-Polymer Electro-thermal bimorph actuators with SiC bottom-layer for large out-of-plane motion and improved power efficiency

Content Provider	IEEE Xplore Digital Library
Author	Aarts, M. Wei, J. Sarro, P.M.
Copyright Year	2012
Description	Author affiliation: Department of Electronic Components, Technology and Materials, TU Delft, NETHERLANDS (Aarts, M.; Wei, J.; Sarro, P.M.)
Abstract	This paper presents the fabrication and characterization of a silicon-polymer electro-thermal out-of-plane bimorph actuator with SiC as bottom layer, for improved motion and better energy efficiency. The proposed concept improves on an earlier design using aluminum by making the bottom layer of SiC, a more robust material with a lower CTE. A process is developed to fabricate out-of-plane actuators with either Al or SiC as bottom layer. Both devices are characterized and their performances are compared. The new actuator with SiC as bottom layer shows a higher displacement (15.5µm) with less actuation voltage (4 V) and an average temperature increase on the actuator of 82°C.
Starting Page	253
Ending Page	256
File Size	1416494
Page Count	4
File Format	PDF
ISBN	9781467311229
e-ISBN	9781467311243
DOI	10.1109/NEMS.2012.6196768
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2012-03-05
Publisher Place	Japan
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Silicon Silicon carbide Artificial intelligence Manganese styling formatting style
Content Type	Text
Resource Type	Article

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