NDLI: Technique for preparing defect-free spray coated resist film

Content Provider	IEEE Xplore Digital Library
Author	Kumar Singh, V. Sasaki, M. Jong Hyeong Song Hane, K.
Copyright Year	2003
Description	Author affiliation: Dept. of Mechatronics & Precision Eng., Tohoku Univ., Sendai, Japan (Kumar Singh, V.; Sasaki, M.; Jong Hyeong Song; Hane, K.)
Abstract	Up to now some 3-D (three-dimensional) devices have been demonstrated using the spray coating of photoresist. Since the detail of the technical performance is not clear, the spray coating technique is still in its infancy. In this study, a technique for preparing the defect-free spray coated resist film is described. A solvent (thinner) vapor is used to fill the pinhole assisting the resist flow. Since this flow is generated by the surface tension, it degrades the uniformity of the resist film on the cavity by decreasing the thickness at convex corner. The balance between the removing effect of pinholes and the thinning effect at convex corners is examined finding the appropriate condition.
Sponsorship	IEEE Electron Devices Soc
Starting Page	817
Ending Page	820
File Size	253064
Page Count	4
File Format	PDF
ISBN	0780377311
DOI	10.1109/SENSOR.2003.1215599
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2003-06-08
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Spraying Resists Coatings Surface tension Degradation Optical films Lithography Temperature control Thickness measurement Mechatronics
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
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9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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