NDLI: Fabrication of an electrothermally actuated electrostatic microgripper

Content Provider	IEEE Xplore Digital Library
Author	Lee, S.H. Kwang-Cheol Lee Lee, S.S. Hyeon-Seok Oh
Copyright Year	2003
Description	Author affiliation: Dep. of Mech. Eng., Pohang Univ. of Sci. & Technol., South Korea (Lee, S.H.; Kwang-Cheol Lee; Lee, S.S.)
Abstract	A novel electrostatic microgripper, which can handle micro objects with the electrostatic force, is designed and fabricated. It consists of gripping part with one inner and two outer electrodes, and releasing part with an electrothermal actuator. It grips micro objects using electric field generated between the electrodes, and releases them using the backward motion of inner electrode with electrothermal actuation. The backward motion of inner electrode breaks the electric field and rapidly reduces the remaining charges of objects. The graspless work shows the safe object handling method and also suggests the solution for the releasing problem. The microgrippers are fabricated with 20 /spl mu/m and 40 /spl mu/m thick SOI wafers, and they successfully grip glass beads with 170 /spl mu/m diameter at 250 V and 100 V, respectively.
Sponsorship	IEEE Electron Devices Soc
Starting Page	552
Ending Page	555
File Size	377935
Page Count	4
File Format	PDF
ISBN	0780377311
DOI	10.1109/SENSOR.2003.1215376
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2003-06-08
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Fabrication Electrothermal effects Grippers Electrodes Electrostatic actuators Piezoelectric actuators Probes Shape Adhesives Gravity
Content Type	Text
Resource Type	Article

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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