NDLI: Nanocantilever based mass sensor integrated with CMOS circuitry

Content Provider	IEEE Xplore Digital Library
Author	Davis, Z.J. Abadal, G. Forsen, E. Hansen, O. Campabadal, F. Figueras, E. Esteve, J. Verd, J. Perez-Murano, F. Borrise, X. Nilsson, S.G. Maximov, I. Montelius, L. Barniol, N. Boisen, A.
Copyright Year	2003
Description	Author affiliation: Mikroelektron. Centret, Tech. Univ. Denmark, Lyngby, Denmark (Davis, Z.J.)
Abstract	We have demonstrated the successful integration of a cantilever based mass detector with standard CMOS circuitry. The purpose of the circuitry is to facilitate the readout of the cantilever's deflection in order to measure resonant frequency shifts of the cantilever. The principle and design of the mass detector are presented showing that miniaturization of such cantilever based resonant devices leads to highly sensitive mass sensors, which have the potential to detect single molecules. The design of the readout circuitry used for the first electrical characterization of an integrated cantilever is described in detail. The integration of the cantilever is a post processing module and the full process sequence is discussed. One of the main challenges during the fabrication of the cantilevers is sticktion of the cantilever to the bottom substrate after underclothing. Two dry release techniques were used to solve the problem, namely freeze-drying and resist-assisted release. The fabrication results of cantilevers defined by laser and E-beam lithography are shown. Finally, an AFM based characterization setup is presented and the electrical characterization of a laser-defined cantilever fully integrated with CMOS circuitry is demonstrated. The electrical characterization of the device shows that the resonant behavior of the cantilever depends on the applied voltages, which corresponds to theory.
Sponsorship	IEEE Electron Devices Soc
Starting Page	496
Ending Page	499
File Size	380871
Page Count	4
File Format	PDF
ISBN	0780377311
DOI	10.1109/SENSOR.2003.1215362
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2003-06-08
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Detectors Resonance Optical device fabrication RLC circuits Frequency measurement Integrated circuit measurements Resonant frequency Sensor phenomena and characterization Lithography Laser theory
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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